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JAEWHAN SUNG
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SUWON-SI, KR
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Patents Grants
last 30 patents
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Patent Grant
Extreme ultraviolet (EUV) mask inspection system, a load-lock chamb...
Patent number
11,531,277
Issue date
Dec 20, 2022
Samsung Electronics Co., Ltd.
Jihoon Na
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
EXTREME ULTRAVIOLET (EUV) MASK INSPECTION SYSTEM, A LOAD-LOCK CHAMB...
Publication number
20220283519
Publication date
Sep 8, 2022
Samsung Electronics Co., Ltd.
Jihoon Na
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
APPARATUS FOR GENERATING EXTREME ULTRAVIOLET (EUV), METHOD OF MANUF...
Publication number
20220167492
Publication date
May 26, 2022
Research & Business Foundation Sungkyunkwan University
JIHOON NA
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR