Jaewon Kim

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Fremont, CA, US

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Patents Applicationslast 30 patents

Information Patent Application
WAFER EDGE TILT AND ETCH RATE UNIFORMITY
- Publication number 20250149306
- Publication date May 8, 2025
- LAM RESEARCH CORPORATION
- Pratik Mankidy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
C-shroud Modification For Plasma Uniformity Without Impacting Mecha...
- Publication number 20240014015
- Publication date Jan 11, 2024
- LAM RESEARCH CORPORATION
- Pratik Mankidy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TUNABILITY OF EDGE PLASMA DENSITY FOR TILT CONTROL
- Publication number 20230063007
- Publication date Mar 2, 2023
- LAM RESEARCH CORPORATION
- John Holland
- H01 - BASIC ELECTRIC ELEMENTS