Jagan Rangarajan

Person

Fremont, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
High throughput polishing modules and modular polishing systems
- Patent number 12,308,272
- Issue date May 20, 2025
- Applied Materials, Inc.
- Jagan Rangarajan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate handling in a modular polishing system with single substr...
- Patent number 12,198,944
- Issue date Jan 14, 2025
- Applied Materials, Inc.
- Brian J. Brown
- B24 - GRINDING POLISHING
Information Patent Grant
Wafer processing tools and methods thereof
- Patent number 12,142,513
- Issue date Nov 12, 2024
- Applied Materials, Inc.
- Jagan Rangarajan
- B24 - GRINDING POLISHING
Information Patent Grant
Pad carrier for horizontal pre-clean module
- Patent number 11,942,319
- Issue date Mar 26, 2024
- Applied Materials, Inc.
- Edward Golubovsky
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate cleaning devices and methods thereof
- Patent number 11,745,227
- Issue date Sep 5, 2023
- Applied Materials, Inc.
- Steven M. Zuniga
- B08 - CLEANING
Information Patent Grant
Wafer processing tools and methods thereof
- Patent number 11,749,552
- Issue date Sep 5, 2023
- Applied Materials, Inc.
- Jagan Rangarajan
- B24 - GRINDING POLISHING
Information Patent Grant
Methods and apparatus for Marangoni drying
- Patent number 11,735,438
- Issue date Aug 22, 2023
- Applied Materials, Inc.
- Edwin Velazquez
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Non-contact clean module
- Patent number 11,721,563
- Issue date Aug 8, 2023
- Applied Materials, Inc.
- Jagan Rangarajan
- B08 - CLEANING
Information Patent Grant
Substrate handling systems
- Patent number 11,705,354
- Issue date Jul 18, 2023
- Applied Materials, Inc.
- Gee Sun Hoey
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ethercat liquid flow controller communication for substrate process...
- Patent number 11,693,435
- Issue date Jul 4, 2023
- Applied Materials, Inc.
- Ricardo Martinez
- G05 - CONTROLLING REGULATING
Information Patent Grant
Non-contact clean module
- Patent number 11,289,347
- Issue date Mar 29, 2022
- Applied Materials, Inc.
- Jagan Rangarajan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Non-contact clean module
- Patent number 11,158,524
- Issue date Oct 26, 2021
- Applied Materials, Inc.
- Jagan Rangarajan
- B08 - CLEANING
Information Patent Grant
Spray bar design for uniform liquid flow distribution on a substrate
- Patent number 10,751,738
- Issue date Aug 25, 2020
- Applied Materials, Inc.
- Jagan Rangarajan
- B08 - CLEANING
Information Patent Grant
Multi-platen multi-head polishing architecture
- Patent number 9,227,293
- Issue date Jan 5, 2016
- Applied Materials, Inc.
- Jeffrey Drue David
- B24 - GRINDING POLISHING
Information Patent Grant
Methods of verifying effectiveness of a put of a substrate onto a s...
- Patent number 8,444,129
- Issue date May 21, 2013
- Applied Materials, Inc.
- Douglas MacLeod
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
End effector for a cluster tool
- Patent number 8,322,963
- Issue date Dec 4, 2012
- Applied Materials, Inc.
- Jeffrey C. Hudgens
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Polishing system having a track
- Patent number 8,172,643
- Issue date May 8, 2012
- Applied Materials, Inc.
- Alpay Yilmaz
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
HORIZONTAL PRE-CLEAN 2-STAGE DOWNFORCE MECHANISM WITH FLEXURE
- Publication number 20250114902
- Publication date Apr 10, 2025
- Applied Materials, Inc.
- Avyay Panchapakesan
- B24 - GRINDING POLISHING
Information Patent Application
Modular Fluid Delivery Assembly
- Publication number 20250079192
- Publication date Mar 6, 2025
- Applied Materials, Inc.
- Ricardo MARTINEZ
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEDICATED SULFURIC-PEROXIDE PROCESS MODULE FOR POST-CMP CLEANING PL...
- Publication number 20240412985
- Publication date Dec 12, 2024
- Applied Materials, Inc.
- Clinton SAKATA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DROPLET JET NOZZLE DESIGN
- Publication number 20240390924
- Publication date Nov 28, 2024
- Applied Materials, Inc.
- Manikandan JAYARAMAN
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
DROPLET JET NOZZLE DESIGN
- Publication number 20240395579
- Publication date Nov 28, 2024
- Applied Materials, Inc.
- Manikandan JAYARAMAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE CLEANING IMPROVEMENT
- Publication number 20240363371
- Publication date Oct 31, 2024
- Applied Materials, Inc.
- Edward GOLUBOVSKY
- B08 - CLEANING
Information Patent Application
METHODS FOR UPPER PLATEN MANUFACTURING
- Publication number 20240307963
- Publication date Sep 19, 2024
- Applied Materials, Inc.
- Ximeng XUE
- B22 - CASTING POWDER METALLURGY
Information Patent Application
INTEGRATED CLEAN AND DRY MODULE FOR CLEANING A SUBSTRATE
- Publication number 20240222152
- Publication date Jul 4, 2024
- Applied Materials, Inc.
- Jason A. RYE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR PROCESSING A SUBSTRATE IN CLEANING MODULES
- Publication number 20240100713
- Publication date Mar 28, 2024
- Applied Materials, Inc.
- Jagan RANGARAJAN
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
METHOD AND APPARATUS FOR PROCESSING A SUBSTRATE IN CLEANING MODULES
- Publication number 20240100714
- Publication date Mar 28, 2024
- Applied Materials, Inc.
- Jagan RANGARAJAN
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
WAFER PROCESSING TOOLS AND METHODS THEREOF
- Publication number 20230352337
- Publication date Nov 2, 2023
- Applied Materials, Inc.
- Jagan Rangarajan
- B24 - GRINDING POLISHING
Information Patent Application
PAD CARRIER ASSEMBLY FOR HORIZONTAL PRE-CLEAN MODULE
- Publication number 20230264319
- Publication date Aug 24, 2023
- Applied Materials, Inc.
- Edward GOLUBOVSKY
- B24 - GRINDING POLISHING
Information Patent Application
PAD CARRIER FOR HORIZONTAL PRE-CLEAN MODULE
- Publication number 20220199396
- Publication date Jun 23, 2022
- Applied Materials, Inc.
- Edward GOLUBOVSKY
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE HANDLING IN A MODULAR POLISHING SYSTEM WITH SINGLE SUBSTR...
- Publication number 20220143780
- Publication date May 12, 2022
- Applied Materials, Inc.
- Brian J. BROWN
- B24 - GRINDING POLISHING
Information Patent Application
HORIZONTAL BUFFING MODULE
- Publication number 20220134505
- Publication date May 5, 2022
- Applied Materials, Inc.
- Edward GOLUBOVSKY
- B24 - GRINDING POLISHING
Information Patent Application
NON-CONTACT CLEAN MODULE
- Publication number 20220044946
- Publication date Feb 10, 2022
- Applied Materials, Inc.
- Jagan RANGARAJAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE HANDLING SYSTEMS
- Publication number 20220013394
- Publication date Jan 13, 2022
- Applied Materials, Inc.
- Gee Sun HOEY
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ETHERCAT LIQUID FLOW CONTROLLER COMMUNICATION FOR SUBSTRATE PROCESS...
- Publication number 20210405665
- Publication date Dec 30, 2021
- Applied Materials, Inc.
- Ricardo Martinez
- G05 - CONTROLLING REGULATING
Information Patent Application
HIGH THROUGHPUT POLISHING MODULES AND MODULAR POLISHING SYSTEMS
- Publication number 20210323118
- Publication date Oct 21, 2021
- Applied Materials, Inc.
- Jagan RANGARAJAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH THROUGHPUT POLISHING MODULES AND MODULAR POLISHING SYSTEMS
- Publication number 20210323117
- Publication date Oct 21, 2021
- Applied Materials, Inc.
- Jagan RANGARAJAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH THROUGHPUT POLISHING MODULES AND MODULAR POLISHING SYSTEMS
- Publication number 20210323119
- Publication date Oct 21, 2021
- Applied Materials, Inc.
- Jagan RANGARAJAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate Cleaning Devices and Methods Thereof
- Publication number 20200246841
- Publication date Aug 6, 2020
- Steven M. Zuniga
- B08 - CLEANING
Information Patent Application
Wafer Processing Tools and Methods Thereof
- Publication number 20200234995
- Publication date Jul 23, 2020
- Jagan Rangarajan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND APPARATUS FOR MARANGONI DRYING
- Publication number 20200176279
- Publication date Jun 4, 2020
- Applied Materials, Inc.
- Edwin VELAZQUEZ
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
NON-CONTACT CLEAN MODULE
- Publication number 20200043756
- Publication date Feb 6, 2020
- Applied Materials, Inc.
- Jagan RANGARAJAN
- B08 - CLEANING
Information Patent Application
SPRAY BAR DESIGN FOR UNIFORM LIQUID FLOW DISTRIBUTION ON A SUBSTRATE
- Publication number 20180185857
- Publication date Jul 5, 2018
- Applied Materials, Inc.
- Jagan RANGARAJAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Multi-Platen Multi-Head Polishing Architecture
- Publication number 20160101497
- Publication date Apr 14, 2016
- Applied Materials, Inc.
- Jeffrey Drue David
- B24 - GRINDING POLISHING
Information Patent Application
Polishing System with In-Sequence Sensor
- Publication number 20140141696
- Publication date May 22, 2014
- Applied Materials, Inc.
- Jeffrey Drue David
- B24 - GRINDING POLISHING
Information Patent Application
Multi-Platen Multi-Head Polishing Architecture
- Publication number 20140141695
- Publication date May 22, 2014
- Applied Materials, Inc.
- Jeffrey Drue David
- B24 - GRINDING POLISHING
Information Patent Application
Carrier Head Sweep Motor Current for In-Situ Monitoring
- Publication number 20140020830
- Publication date Jan 23, 2014
- Applied Materials, Inc.
- Jagan Rangarajan
- B24 - GRINDING POLISHING

Jagan Rangarajan

Person

Patents Grantslast 30 patents

High throughput polishing modules and modular polishing systems

Substrate handling in a modular polishing system with single substr...

Wafer processing tools and methods thereof

Pad carrier for horizontal pre-clean module

Substrate cleaning devices and methods thereof

Wafer processing tools and methods thereof

Methods and apparatus for Marangoni drying

Non-contact clean module

Substrate handling systems

Ethercat liquid flow controller communication for substrate process...

Non-contact clean module

Non-contact clean module

Spray bar design for uniform liquid flow distribution on a substrate

Multi-platen multi-head polishing architecture

Methods of verifying effectiveness of a put of a substrate onto a s...

End effector for a cluster tool

Polishing system having a track

Patents Applicationslast 30 patents

HORIZONTAL PRE-CLEAN 2-STAGE DOWNFORCE MECHANISM WITH FLEXURE

Modular Fluid Delivery Assembly

DEDICATED SULFURIC-PEROXIDE PROCESS MODULE FOR POST-CMP CLEANING PL...

DROPLET JET NOZZLE DESIGN

DROPLET JET NOZZLE DESIGN

SUBSTRATE CLEANING IMPROVEMENT

METHODS FOR UPPER PLATEN MANUFACTURING

INTEGRATED CLEAN AND DRY MODULE FOR CLEANING A SUBSTRATE

METHOD AND APPARATUS FOR PROCESSING A SUBSTRATE IN CLEANING MODULES

METHOD AND APPARATUS FOR PROCESSING A SUBSTRATE IN CLEANING MODULES

WAFER PROCESSING TOOLS AND METHODS THEREOF

PAD CARRIER ASSEMBLY FOR HORIZONTAL PRE-CLEAN MODULE

PAD CARRIER FOR HORIZONTAL PRE-CLEAN MODULE

SUBSTRATE HANDLING IN A MODULAR POLISHING SYSTEM WITH SINGLE SUBSTR...

HORIZONTAL BUFFING MODULE

NON-CONTACT CLEAN MODULE

SUBSTRATE HANDLING SYSTEMS

ETHERCAT LIQUID FLOW CONTROLLER COMMUNICATION FOR SUBSTRATE PROCESS...

HIGH THROUGHPUT POLISHING MODULES AND MODULAR POLISHING SYSTEMS

HIGH THROUGHPUT POLISHING MODULES AND MODULAR POLISHING SYSTEMS

HIGH THROUGHPUT POLISHING MODULES AND MODULAR POLISHING SYSTEMS

Substrate Cleaning Devices and Methods Thereof

Wafer Processing Tools and Methods Thereof

METHODS AND APPARATUS FOR MARANGONI DRYING

NON-CONTACT CLEAN MODULE

SPRAY BAR DESIGN FOR UNIFORM LIQUID FLOW DISTRIBUTION ON A SUBSTRATE

Multi-Platen Multi-Head Polishing Architecture

Polishing System with In-Sequence Sensor

Multi-Platen Multi-Head Polishing Architecture

Carrier Head Sweep Motor Current for In-Situ Monitoring