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Jai-Heung Choi
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Yongin-si, KR
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Patents Grants
last 30 patents
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Patent Grant
Air shower head of photolithography equipment for directing air tow...
Patent number
6,522,385
Issue date
Feb 18, 2003
Samsung Electronics Co., Ltd.
Yo-Han Ahn
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
Air shower head of photolithography equipment for directing air tow...
Publication number
20010048510
Publication date
Dec 6, 2001
Yo-Han Ahn
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY