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Jairaj J. PAYYAPILLY
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Sunnyvale, CA, US
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Patents Grants
last 30 patents
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Patent Grant
Methods and apparatus for in-situ protection liners for high aspect...
Patent number
11,373,877
Issue date
Jun 28, 2022
Applied Materials, Inc.
Daisuke Shimizu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Etching oxide-nitride stacks using C4F6H2
Patent number
9,748,366
Issue date
Aug 29, 2017
Applied Materials, Inc.
Jong Mun Kim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma etch processes for opening mask layers
Patent number
9,305,804
Issue date
Apr 5, 2016
Applied Materials, Inc.
Jong Mun Kim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma etch processes for boron-doped carbonaceous mask layers
Patent number
8,778,207
Issue date
Jul 15, 2014
Applied Materials, Inc.
Jong Mun Kim
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
METHODS AND APPARATUS FOR IN-SITU PROTECTION LINERS FOR HIGH ASPECT...
Publication number
20210320012
Publication date
Oct 14, 2021
Applied Materials, Inc.
Daisuke SHIMIZU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ETCHING OXIDE-NITRIDE STACKS USING C4F6H2
Publication number
20150097276
Publication date
Apr 9, 2015
Applied Materials, Inc.
Jong Mun Kim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA ETCH PROCESSES FOR OPENING MASK LAYERS
Publication number
20150099367
Publication date
Apr 9, 2015
Applied Materials, Inc.
Jong Mun KIM
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS FOR ETCHING OXIDE LAYERS USING PROCESS GAS PULSING
Publication number
20130224960
Publication date
Aug 29, 2013
Applied Materials, Inc.
Jairaj Payyapilly
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF ETCHING HIGH ASPECT RATIO FEATURES IN A DIELECTRIC LAYER
Publication number
20130122712
Publication date
May 16, 2013
Jong Mun KIM
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA ETCH PROCESSES FOR BORON-DOPED CARBONACEOUS MASK LAYERS
Publication number
20130109188
Publication date
May 2, 2013
Jong Mun KIM
H01 - BASIC ELECTRIC ELEMENTS