James A. Cooper

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San Jose, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Integrated method for release and passivation of MEMS structures
- Patent number 6,902,947
- Issue date Jun 7, 2005
- Applied Materials, Inc.
- Jeffrey D. Chinn
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of etching variable depth features in a crystalline substrate
- Patent number 6,900,133
- Issue date May 31, 2005
- Applied Materials, Inc.
- Jeffrey D. Chinn
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Integrated method for release and passivation of MEMS structures
- Patent number 6,830,950
- Issue date Dec 14, 2004
- Applied Materials, Inc.
- Jeffrey D. Chinn
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
Disposable barrier technique for through wafer etching in MEMS
- Publication number 20040087054
- Publication date May 6, 2004
- APPLIED MATERIALS, INC.
- Jeffrey D. Chinn
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method of etching variable depth features in a crystalline substrate
- Publication number 20040053505
- Publication date Mar 18, 2004
- Jeffrey D. Chinn
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Integrated method for release and passivation of MEMS structures
- Publication number 20040033639
- Publication date Feb 19, 2004
- APPLIED MATERIALS, INC.
- Jeffrey D. Chinn
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Integrated method for release and passivation of MEMS structures
- Publication number 20030166342
- Publication date Sep 4, 2003
- APPLIED MATERIALS, INC.
- Jeffrey D. Chinn
- B81 - MICRO-STRUCTURAL TECHNOLOGY