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James A. Fair
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Mountain View, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Plasma generator apparatus
Patent number
8,864,935
Issue date
Oct 21, 2014
Novellus Systems, Inc.
James A. Fair
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Sequential UV induced chemical vapor deposition
Patent number
7,897,215
Issue date
Mar 1, 2011
Novellus Systems, Inc.
James A. Fair
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Deposition of tungsten nitride
Patent number
7,691,749
Issue date
Apr 6, 2010
Novellus Systems, Inc.
Karl B. Levy
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Adhesion promotion for etch by-products
Patent number
7,176,140
Issue date
Feb 13, 2007
Novellus Systems, Inc.
Michael Rivkin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Selective refractory metal and nitride capping
Patent number
7,157,798
Issue date
Jan 2, 2007
Novellus Systems, Inc.
James A. Fair
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
ALD of tantalum using a hydride reducing agent
Patent number
7,144,806
Issue date
Dec 5, 2006
Novellus Systems, Inc.
James A. Fair
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method for preventing and cleaning ruthenium-containing deposits in...
Patent number
7,107,998
Issue date
Sep 19, 2006
Novellus Systems, Inc.
Harold F. R. Greer
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Thin layer metal chemical vapor deposition
Patent number
7,014,709
Issue date
Mar 21, 2006
Novellus Systems, Inc.
James A. Fair
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Deposition of tungsten nitride
Patent number
7,005,372
Issue date
Feb 28, 2006
Novellus Systems, Inc.
Karl B. Levy
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Methods of forming tungsten nucleation layer
Patent number
6,905,543
Issue date
Jun 14, 2005
Novellus Systems, Inc.
James A. Fair
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Thin layer metal chemical vapor deposition
Patent number
6,849,122
Issue date
Feb 1, 2005
Novellus Systems, Inc.
James A. Fair
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Selective refractory metal and nitride capping
Patent number
6,844,258
Issue date
Jan 18, 2005
Novellus Systems, Inc.
James A. Fair
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Sequential electron induced chemical vapor deposition
Patent number
6,720,260
Issue date
Apr 13, 2004
Novellus Systems, Inc.
James A. Fair
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Sequential ion, UV, and electron induced chemical vapor deposition
Patent number
6,627,268
Issue date
Sep 30, 2003
Novellus Systems, Inc.
James A. Fair
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Copper atomic layer chemical vapor desposition
Patent number
6,464,779
Issue date
Oct 15, 2002
Novellus Systems, Inc.
Ronald A. Powell
C30 - CRYSTAL GROWTH
Information
Patent Grant
Method of delivering source reagent vapor mixtures for chemical vap...
Patent number
6,010,748
Issue date
Jan 4, 2000
Advanced Technology Materials, Inc.
Peter C. Van Buskirk
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method and structure for reducing short circuits between overlappin...
Patent number
5,751,019
Issue date
May 12, 1998
Varian Associates, Inc.
James A. Fair
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Interiorly partitioned vapor injector for delivery of source reagen...
Patent number
5,741,363
Issue date
Apr 21, 1998
Advanced Technology Materials, Inc.
Peter C. Van Buskirk
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of and apparatus for non-contact temperature measurement
Patent number
5,208,643
Issue date
May 4, 1993
Varian Associates, Inc.
James A. Fair
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method and apparatus for deposition of tungsten silicides
Patent number
4,920,908
Issue date
May 1, 1990
Genus, Inc.
Daniel L. Brors
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method and apparatus for deposition of tungsten silicides
Patent number
4,565,157
Issue date
Jan 21, 1986
Genus, Inc.
Daniel L. Brors
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
PLASMA GENERATOR APPARATUS
Publication number
20150075718
Publication date
Mar 19, 2015
Novellus Systems, Inc.
James A. Fair
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA GENERATOR APPARATUS
Publication number
20120247674
Publication date
Oct 4, 2012
James A. Fair
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Plasma Reaction Apparatus Having Pre-Seasoned Showerheads and Metho...
Publication number
20080216958
Publication date
Sep 11, 2008
Novellus Systems, Inc.
Haruhiro Harry GOTO
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Plasma Generator Apparatus
Publication number
20080156264
Publication date
Jul 3, 2008
Novellus Systems, Inc.
James A. Fair
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Methods of Producing Plasma in a Container
Publication number
20080156631
Publication date
Jul 3, 2008
Novellus Systems, Inc.
James A. Fair
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Deposition of tungsten nitride
Publication number
20060094238
Publication date
May 4, 2006
Novellus Systems, Inc.
Karl B. Levy
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Method for preventing and cleaning ruthenium-containing deposits in...
Publication number
20050081882
Publication date
Apr 21, 2005
Novellus Systems, Inc.
Harold F.R. Greer
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Deposition of tungsten nitride
Publication number
20040142557
Publication date
Jul 22, 2004
Novellus Systems, Inc.
Karl B. Levy
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...