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James A. McClay
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Oxford, CT, US
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Patents Grants
last 30 patents
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Patent Grant
System and method for reticle protection and transport
Patent number
7,249,925
Issue date
Jul 31, 2007
ASML Holding N.V.
Santiago E. del Puerto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
System and method for reticle protection and transport
Patent number
6,991,416
Issue date
Jan 31, 2006
ASML Holding N.V.
Santiago E. del Puerto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Polarization beam splitter for photolithography
Patent number
6,680,794
Issue date
Jan 20, 2004
ASML Holding N.V.
James A. McClay
G02 - OPTICS
Information
Patent Grant
System and method for reticle protection and transport
Patent number
6,619,903
Issue date
Sep 16, 2003
Glenn M. Friedman
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ultraviolet polarization beam splitter for microlithography
Patent number
6,480,330
Issue date
Nov 12, 2002
Silicon Valley Group, Inc.
James A. McClay
G02 - OPTICS
Patents Applications
last 30 patents
Information
Patent Application
System and method for reticle protection and transport
Publication number
20060078407
Publication date
Apr 13, 2006
ASML Holding N.V.
Santiago E. del Puerto
B82 - NANO-TECHNOLOGY
Information
Patent Application
Polarization beam splitter for photolithography
Publication number
20030086158
Publication date
May 8, 2003
Silicon Valley Group, Inc.
James A. McClay
G02 - OPTICS
Information
Patent Application
System and method for reticle protection and transport
Publication number
20030082030
Publication date
May 1, 2003
Santiago E. del Puerto
B82 - NANO-TECHNOLOGY
Information
Patent Application
SYSTEM AND METHOD FOR RETICLE PROTECTION AND TRANSPORT
Publication number
20030031545
Publication date
Feb 13, 2003
Silicon Valley Group, Inc.
Michael DeMarco
B82 - NANO-TECHNOLOGY