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James A. Soobitsky
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Higganum, CT, US
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last 30 patents
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Patent Grant
Piezoelectric micromotion actuator
Patent number
4,577,131
Issue date
Mar 18, 1986
Zygo Corporation
James A. Soobitsky
G01 - MEASURING TESTING
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last 30 patents
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Patent Application
DYNAMIC INTERFEROMETER ILLUMINATOR
Publication number
20250123095
Publication date
Apr 17, 2025
Zygo Corporation
Leslie L. Deck
G01 - MEASURING TESTING