James Albert Gilhooly

Person

Saint Albans, VT, US

People

Patents Grantslast 30 patents

Information Patent Grant
Apparatus for detecting CMP endpoint in acidic slurries
- Patent number 6,899,784
- Issue date May 31, 2005
- International Business Machines Corporation
- Leping Li
- B24 - GRINDING POLISHING
Information Patent Grant
Method for detecting CMP endpoint in acidic slurries
- Patent number 6,878,629
- Issue date Apr 12, 2005
- International Business Machines Corporation
- Leping Li
- B24 - GRINDING POLISHING
Information Patent Grant
Chemiluminescence detection apparatus
- Patent number 6,506,341
- Issue date Jan 14, 2003
- International Business Machines Corporation
- Leping Li
- B24 - GRINDING POLISHING
Information Patent Grant
Indirect endpoint detection by chemical reaction and chemiluminescence
- Patent number 6,440,263
- Issue date Aug 27, 2002
- International Business Machines Corporation
- Leping Li
- B24 - GRINDING POLISHING
Information Patent Grant
Endpoint detection by chemical reaction
- Patent number 6,419,785
- Issue date Jul 16, 2002
- International Business Machines Corporation
- Leping Li
- B24 - GRINDING POLISHING
Information Patent Grant
Chemical mechanical polishing endpoint process control
- Patent number 6,276,987
- Issue date Aug 21, 2001
- International Business Machines Corporation
- Leping Li
- B24 - GRINDING POLISHING
Information Patent Grant
Optimization of CMP process by detecting of oxide/nitride interface...
- Patent number 6,261,851
- Issue date Jul 17, 2001
- International Business Machines Corporation
- Leping Li
- B24 - GRINDING POLISHING
Information Patent Grant
Optimization of chemical mechanical process by detection of oxide/n...
- Patent number 6,254,453
- Issue date Jul 3, 2001
- International Business Machines Corporation
- Leping Li
- G01 - MEASURING TESTING
Information Patent Grant
Real-time control of chemical-mechanical polishing processing by mo...
- Patent number 6,251,784
- Issue date Jun 26, 2001
- International Business Machines Corporation
- Leping Li
- B24 - GRINDING POLISHING
Information Patent Grant
Endpoint detection by chemical reaction and reagent
- Patent number 6,228,280
- Issue date May 8, 2001
- International Business Machines Corporation
- Leping Li
- B24 - GRINDING POLISHING
Information Patent Grant
Endpoint detection by chemical reaction and photoionization
- Patent number 6,228,769
- Issue date May 8, 2001
- International Business Machines Corporation
- Leping Li
- B24 - GRINDING POLISHING
Information Patent Grant
Endpoint detection by chemical reaction and light scattering
- Patent number 6,194,230
- Issue date Feb 27, 2001
- International Business Machines Corporation
- Leping Li
- B24 - GRINDING POLISHING
Information Patent Grant
Endpoint detection by chemical reaction
- Patent number 6,180,422
- Issue date Jan 30, 2001
- International Business Machines Corporation
- Leping Li
- B24 - GRINDING POLISHING
Information Patent Grant
Accumulator for slurry sampling
- Patent number 6,176,765
- Issue date Jan 23, 2001
- International Business Machines Corporation
- Leping Li
- B24 - GRINDING POLISHING
Information Patent Grant
Indirect endpoint detection by chemical reaction and chemiluminescence
- Patent number 6,126,848
- Issue date Oct 3, 2000
- International Business Machines Corporation
- Leping Li
- B24 - GRINDING POLISHING
Information Patent Grant
Indirect endpoint detection by chemical reaction
- Patent number 6,066,564
- Issue date May 23, 2000
- International Business Machines Corporation
- Leping Li
- B24 - GRINDING POLISHING
Information Patent Grant
Probe for slurry gas sampling
- Patent number 6,021,679
- Issue date Feb 8, 2000
- International Business Machines Corporation
- Leping Li
- G01 - MEASURING TESTING
Information Patent Grant
Process for removing residue from a semiconductor wafer after chemi...
- Patent number 5,704,987
- Issue date Jan 6, 1998
- International Business Machines Corporation
- Cuc Kim Huynh
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
Interface device for sti/bpsg EPD and real time control
- Publication number 20030206114
- Publication date Nov 6, 2003
- Leping Li
- G05 - CONTROLLING REGULATING
Information Patent Application
CHEMILUMINESCENCE DETECTION APPARATUS
- Publication number 20010007772
- Publication date Jul 12, 2001
- LEPING LI
- G01 - MEASURING TESTING

James Albert Gilhooly

Person

Patents Grantslast 30 patents

Apparatus for detecting CMP endpoint in acidic slurries

Method for detecting CMP endpoint in acidic slurries

Chemiluminescence detection apparatus

Indirect endpoint detection by chemical reaction and chemiluminescence

Endpoint detection by chemical reaction

Chemical mechanical polishing endpoint process control

Optimization of CMP process by detecting of oxide/nitride interface...

Optimization of chemical mechanical process by detection of oxide/n...

Real-time control of chemical-mechanical polishing processing by mo...

Endpoint detection by chemical reaction and reagent

Endpoint detection by chemical reaction and photoionization

Endpoint detection by chemical reaction and light scattering

Endpoint detection by chemical reaction

Accumulator for slurry sampling

Indirect endpoint detection by chemical reaction and chemiluminescence

Indirect endpoint detection by chemical reaction

Probe for slurry gas sampling

Process for removing residue from a semiconductor wafer after chemi...

Patents Applicationslast 30 patents

Interface device for sti/bpsg EPD and real time control

CHEMILUMINESCENCE DETECTION APPARATUS