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James Broc Stirton
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Austin, TX, US
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Patents Grants
last 30 patents
Information
Patent Grant
Methods of error detection in fabrication processes
Patent number
10,289,109
Issue date
May 14, 2019
GLOBALFOUNDRIES Inc.
Richard Good
G05 - CONTROLLING REGULATING
Information
Patent Grant
Methods of error detection in fabrication processes
Patent number
10,241,502
Issue date
Mar 26, 2019
GLOBALFOUNDRIES Inc.
Eugene Barash
G05 - CONTROLLING REGULATING
Information
Patent Grant
Method and apparatus for extracting dose and focus from critical di...
Patent number
8,149,384
Issue date
Apr 3, 2012
Advanced Micro Devices, Inc.
Siddharth Chauhan
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method and apparatus for optimizing models for extracting dose and...
Patent number
7,925,369
Issue date
Apr 12, 2011
GLOBALFOUNDRIES Inc.
Siddharth Chauhan
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method and apparatus for compensating metrology data for site bias...
Patent number
7,738,986
Issue date
Jun 15, 2010
GLOBALFOUNDRIES, INC.
James Broc Stirton
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Method and apparatus for metrology sampling using combination sampl...
Patent number
7,565,254
Issue date
Jul 21, 2009
Advanced Micro Devices, Inc.
Richard P. Good
Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information
Patent Grant
Method and apparatus for selecting sites for sampling
Patent number
7,330,800
Issue date
Feb 12, 2008
Advanced Micro Devices, Inc.
Richard P. Good
G01 - MEASURING TESTING
Information
Patent Grant
Method of measuring implant profiles using scatterometric techniques
Patent number
6,989,900
Issue date
Jan 24, 2006
Advanced Micro Devices, Inc.
James Broc Stirton
G01 - MEASURING TESTING
Information
Patent Grant
Method and apparatus for generating a polishing process endpoint si...
Patent number
6,980,300
Issue date
Dec 27, 2005
Advanced Micro Devices, Inc.
Kevin R. Lensing
B24 - GRINDING POLISHING
Information
Patent Grant
Methods of calibrating and controlling stepper exposure processes a...
Patent number
6,972,853
Issue date
Dec 6, 2005
Advanced Micro Devices, Inc.
James Broc Stirton
G01 - MEASURING TESTING
Information
Patent Grant
Method and apparatus for dispatching based on metrology tool perfor...
Patent number
6,968,252
Issue date
Nov 22, 2005
Advanced Micro Devices, Inc.
Alexander J. Pasadyn
Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information
Patent Grant
Method of monitoring anneal processes using scatterometry, and syst...
Patent number
6,933,158
Issue date
Aug 23, 2005
Advanced Micro Devices, Inc.
Kevin R. Lensing
G01 - MEASURING TESTING
Information
Patent Grant
Structures for analyzing electromigration, and methods of using same
Patent number
6,927,080
Issue date
Aug 9, 2005
Advanced Micro Devices, Inc.
Homi E. Nariman
G01 - MEASURING TESTING
Information
Patent Grant
Method of using scatterometry for analysis of electromigration, and...
Patent number
6,881,594
Issue date
Apr 19, 2005
Advanced Micro Devices, Inc.
James Broc Stirton
G01 - MEASURING TESTING
Information
Patent Grant
Methods of using adaptive sampling techniques based upon categoriza...
Patent number
6,859,746
Issue date
Feb 22, 2005
Advanced Micro Devices, Inc.
James Broc Stirton
Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information
Patent Grant
Method and apparatus for filtering metrology data based on collecti...
Patent number
6,836,691
Issue date
Dec 28, 2004
Advanced Micro Devices, Inc.
James B. Stirton
G05 - CONTROLLING REGULATING
Information
Patent Grant
Method of using critical dimension measurements to control stepper...
Patent number
6,808,946
Issue date
Oct 26, 2004
Advanced Micro Devices, Inc.
James Broc Stirton
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of using scatterometry measurements to control stepper proce...
Patent number
6,790,570
Issue date
Sep 14, 2004
Advanced Micro Devices, Inc.
James Broc Stirton
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of using high yielding spectra scatterometry measurements to...
Patent number
6,785,009
Issue date
Aug 31, 2004
Advanced Micro Devices, Inc.
James Broc Stirton
G01 - MEASURING TESTING
Information
Patent Grant
Method and apparatus for identifying misregistration in a complimen...
Patent number
6,774,998
Issue date
Aug 10, 2004
Advanced Micro Devices, Inc.
Marilyn I. Wright
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of correcting non-linearity of metrology tools, and system f...
Patent number
6,746,882
Issue date
Jun 8, 2004
Advanced Micro Devices, Inc.
James Broc Stirton
G01 - MEASURING TESTING
Information
Patent Grant
Method and apparatus for performing overlay measurements using scat...
Patent number
6,716,646
Issue date
Apr 6, 2004
Advanced Micro Devices, Inc.
Marilyn I. Wright
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for analyzing line structures
Patent number
6,697,153
Issue date
Feb 24, 2004
Advanced Micro Devices, Inc.
Marilyn I. Wright
G01 - MEASURING TESTING
Information
Patent Grant
Method of measuring implant profiles using scatterometric technique...
Patent number
6,660,543
Issue date
Dec 9, 2003
Advanced Micro Devices, Inc.
James Broc Stirton
G01 - MEASURING TESTING
Information
Patent Grant
Method of controlling stepper process parameters based upon optical...
Patent number
6,660,542
Issue date
Dec 9, 2003
Advanced Micro Devices, Inc.
James Broc Stirton
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of detecting degradation in photolithography processes based...
Patent number
6,643,008
Issue date
Nov 4, 2003
Advanced Micro Devices, Inc.
James Broc Stirton
G01 - MEASURING TESTING
Information
Patent Grant
Method for calibrating optical-based metrology tools
Patent number
6,623,994
Issue date
Sep 23, 2003
Advanced Micro Devices, Inc.
James Broc Stirton
G01 - MEASURING TESTING
Information
Patent Grant
Method of identifying film stacks based upon optical properties
Patent number
6,618,149
Issue date
Sep 9, 2003
Advanced Micro Devices, Inc.
James Broc Stirton
G01 - MEASURING TESTING
Information
Patent Grant
Method and apparatus for determining feature characteristics using...
Patent number
6,614,540
Issue date
Sep 2, 2003
Advanced Micro Devices, Inc.
James Broc Stirton
G01 - MEASURING TESTING
Information
Patent Grant
Method of integrating scatterometry metrology structures directly i...
Patent number
6,602,723
Issue date
Aug 5, 2003
Advanced Micro Devices, Inc.
Richard J. Markle
G01 - MEASURING TESTING
Patents Applications
last 30 patents
Information
Patent Application
METHODS OF ERROR DETECTION IN FABRICATION PROCESSES
Publication number
20170097638
Publication date
Apr 6, 2017
GLOBALFOUNDRIES INC.
Richard GOOD
G05 - CONTROLLING REGULATING
Information
Patent Application
METHODS OF ERROR DETECTION IN FABRICATION PROCESSES
Publication number
20170097635
Publication date
Apr 6, 2017
GLOBALFOUNDRIES INC.
Eugene BARASH
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
METHOD AND APPARATUS FOR OPTIMIZING MODELS FOR EXTRACTING DOSE AND...
Publication number
20090157577
Publication date
Jun 18, 2009
Siddharth Chauhan
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD AND APPARATUS FOR EXTRACTING DOSE AND FOCUS FROM CRITICAL DI...
Publication number
20090153818
Publication date
Jun 18, 2009
Siddharth Chauhan
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method and Apparatus for Compensating Metrology Data for Site Bias...
Publication number
20080147224
Publication date
Jun 19, 2008
James Broc Stirton
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Method and Apparatus for Metrology Sampling Using Combination Sampl...
Publication number
20080147343
Publication date
Jun 19, 2008
Richard P. Good
G05 - CONTROLLING REGULATING