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James C. Oswalt
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Pleasanton, CA, US
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last 30 patents
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Patent Grant
Chemical vapor deposition system including dedicated cleaning gas i...
Patent number
6,200,412
Issue date
Mar 13, 2001
Novellus Systems, Inc.
Michael D. Kilgore
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...