James C. Vetter

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Pine Grove, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Edge ring assembly for improving feature profile tilting at extreme...
- Patent number 10,854,492
- Issue date Dec 1, 2020
- Lam Research Corporation
- William Frederick Bosch
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Measuring and controlling wafer potential in pulsed RF bias processing
- Patent number 9,659,757
- Issue date May 23, 2017
- Lam Research Corporation
- Andras Kuthi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Measuring and controlling wafer potential in pulsed RF bias processing
- Patent number 8,303,763
- Issue date Nov 6, 2012
- Lam Research Corporation
- Andras Kuthi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods of and apparatus for measuring and controlling wafer potent...
- Patent number 8,192,576
- Issue date Jun 5, 2012
- Lam Research Corporation
- Andras Kuthi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electronically diagnosing a component in a process line using a sub...
- Patent number 6,946,303
- Issue date Sep 20, 2005
- Lam Research Corporation
- Janet M. Flanner
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for creating a substrate signature
- Patent number 6,890,774
- Issue date May 10, 2005
- Lam Research Corporation
- Janet M. Flanner
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
EDGE RING ASSEMBLY FOR IMPROVING FEATURE PROFILE TILTING AT EXTREME...
- Publication number 20170053820
- Publication date Feb 23, 2017
- LAM RESEARCH CORPORATION
- William Frederick Bosch
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MEASURING AND CONTROLLING WAFER POTENTIAL IN PULSED RF BIAS PROCESSING
- Publication number 20130050892
- Publication date Feb 28, 2013
- Andras Kuthi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MEASURING AND CONTROLLING WAFER POTENTIAL IN PULSED RF BIAS PROCESSING
- Publication number 20120206127
- Publication date Aug 16, 2012
- Andras Kuthi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Methods of and apparatus for measuring and controlling wafer potent...
- Publication number 20100315064
- Publication date Dec 16, 2010
- Andras Kuthi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Electronically diagnosing a component in a process line using a sub...
- Publication number 20040110311
- Publication date Jun 10, 2004
- Janet M. Flanner
- G05 - CONTROLLING REGULATING
Information Patent Application
System and method for creating a substrate signature
- Publication number 20040110312
- Publication date Jun 10, 2004
- Janet M. Flanner
- H01 - BASIC ELECTRIC ELEMENTS