James Carroll

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Amesbury, MA, US

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Patents Grantslast 30 patents

Information Patent Grant
Electrostatic chuck with radiative heating
- Patent number 8,987,639
- Issue date Mar 24, 2015
- Varian Semiconductor Equipment Associates, Inc.
- Klaus Petry
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Platen clamping surface monitoring
- Patent number 8,592,786
- Issue date Nov 26, 2013
- Varian Semiconductor Equipment Associates, Inc.
- David E. Suuronen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Load lock control
- Patent number 7,381,969
- Issue date Jun 3, 2008
- Axcelis Technologies, Inc.
- Tariq Fasheh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for the grounding of process wafers by the use...
- Patent number 6,552,892
- Issue date Apr 22, 2003
- Axcelis Technologies, Inc.
- James C. Carroll
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Barrier Layer For Electrostatic Chucks
- Publication number 20150062772
- Publication date Mar 5, 2015
- Varian Semiconductor Equipment Associates, Inc.
- Andrew M. Waite
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CHUCK WITH RADIATIVE HEATING
- Publication number 20140061180
- Publication date Mar 6, 2014
- Varian Semiconductor Equipment Associates, Inc.
- Klaus Petry
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLATEN CLAMPING SURFACE MONITORING
- Publication number 20130248738
- Publication date Sep 26, 2013
- Varian Semiconductor Equipment Associates, Inc.
- David E. Suuronen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Load lock control
- Publication number 20070246658
- Publication date Oct 25, 2007
- Axcelis Technologies, Inc.
- Tariq Fasheh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and apparatus for the grounding of process wafers by the use...
- Publication number 20020167779
- Publication date Nov 14, 2002
- James C. Carroll
- H01 - BASIC ELECTRIC ELEMENTS