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James Claypool
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Rolla, MO, US
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last 30 patents
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Patent Grant
Spin-on spacer materials for double- and triple-patterning lithography
Patent number
9,640,396
Issue date
May 2, 2017
Brewer Science Inc.
Qin Lin
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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last 30 patents
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Patent Application
SPIN-ON SPACER MATERIALS FOR DOUBLE- AND TRIPLE-PATTERNING LITHOGRAPHY
Publication number
20100170868
Publication date
Jul 8, 2010
BREWER SCIENCE INC.
Qin Lin
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...