James E. Fair

Follow

Person

Livermore, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate transport assembly for rapid thermal processing system
- Patent number 6,236,021
- Issue date May 22, 2001
- Intevac, Inc.
- James E. Fair
- F26 - DRYING
Information Patent Grant
Heating assembly for rapid thermal processing system
- Patent number 6,204,483
- Issue date Mar 20, 2001
- Intevac, Inc.
- James E. Fair
- F26 - DRYING