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James E. Klekotka
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Mesa, AZ, US
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Patents Grants
last 30 patents
Information
Patent Grant
Methods and apparatus for using an optically tunable soft mask to c...
Patent number
7,555,395
Issue date
Jun 30, 2009
Tokyo Electron Limited
James E. Willis
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method for data pre-population
Patent number
7,437,199
Issue date
Oct 14, 2008
Tokyo Electron Limited
James E Willis
Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information
Patent Grant
Creating an optically tunable anti-reflective coating
Patent number
7,300,730
Issue date
Nov 27, 2007
Tokyo Electron Limited
James E. Willis
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method and apparatus for monitoring parts in a material processing...
Patent number
6,985,787
Issue date
Jan 10, 2006
Tokyo Electron Limited
James E. Klekotka
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Method and apparatus for monitoring a material processing system
Patent number
6,898,558
Issue date
May 24, 2005
Tokyo Electron Limited
James E. Klekotka
Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information
Patent Grant
Technique for satellite constellation growth
Patent number
6,491,257
Issue date
Dec 10, 2002
Motorola, Inc.
Thomas Peter Emmons
B64 - AIRCRAFT AVIATION COSMONAUTICS
Information
Patent Grant
High speed programmable frequency divider and PLL
Patent number
4,856,032
Issue date
Aug 8, 1989
Motorola, Inc.
James E. Klekotka
H03 - BASIC ELECTRONIC CIRCUITRY
Patents Applications
last 30 patents
Information
Patent Application
System and Method For Removing Post-Etch Residue
Publication number
20090211603
Publication date
Aug 27, 2009
TOKYO ELECTRON LIMITED
Thomas Winter
B08 - CLEANING
Information
Patent Application
System and Method For Removing Edge-Bead Material
Publication number
20090211604
Publication date
Aug 27, 2009
TOKYO ELECTRON LIMITED
Thomas Winter
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ACCURACY OF OPTICAL METROLOGY MEASUREMENTS
Publication number
20080076046
Publication date
Mar 27, 2008
TOKYO ELECTRON LIMITED
James E. Willis
G01 - MEASURING TESTING
Information
Patent Application
METHODS AND APPARATUS FOR USING AN OPTICALLY TUNABLE SOFT MASK PROF...
Publication number
20080077352
Publication date
Mar 27, 2008
TOKYO ELECTRON LIMITED
James E. Willis
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHODS AND APPARATUS FOR USING AN OPTICALLY TUNABLE SOFT MASK TO C...
Publication number
20080077362
Publication date
Mar 27, 2008
TOKYO ELECTRON LIMITED
James E. Willis
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
ACCURACY OF OPTICAL METROLOGY MEASUREMENTS
Publication number
20080074677
Publication date
Mar 27, 2008
TOKYO ELECTRON LIMITED
James E. Willis
G01 - MEASURING TESTING
Information
Patent Application
ACCURACY OF OPTICAL METROLOGY MEASUREMENTS
Publication number
20080074678
Publication date
Mar 27, 2008
TOKYO ELECTRON LIMITED
James E. Willis
G01 - MEASURING TESTING
Information
Patent Application
Method for data pre-population
Publication number
20040243256
Publication date
Dec 2, 2004
TOKYO ELECTRON LIMITED
James E. Willis
G05 - CONTROLLING REGULATING
Information
Patent Application
Method and apparatus for monitoring a material processing system
Publication number
20040127030
Publication date
Jul 1, 2004
TOKYO ELECTRON LIMITED
James E. Klekotka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method and apparatus for monitoring a plasma in a material processi...
Publication number
20040127031
Publication date
Jul 1, 2004
TOKYO ELECTRON LIMITED
James E. Klekotka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method and apparatus for monitoring a material processing system
Publication number
20040128021
Publication date
Jul 1, 2004
TOKYO ELECTRON LIMITED
James E. Klekotka
G05 - CONTROLLING REGULATING
Information
Patent Application
Method and apparatus for monitoring parts in a plasma in a material...
Publication number
20040128014
Publication date
Jul 1, 2004
TOKYO ELECTRON LIMITED
James E. Klekotka
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Method and apparatus for monitoring a material processing system
Publication number
20040126906
Publication date
Jul 1, 2004
TOKYO ELECTRON LIMITED
James E. Klekotka
H01 - BASIC ELECTRIC ELEMENTS