James E. Willis

Person

Austin, TX, US

People

Patents Grantslast 30 patents

Information Patent Grant
Methods and apparatus for changing the optical properties of resists
- Patent number 7,763,404
- Issue date Jul 27, 2010
- Tokyo Electron Limited
- James E. Willis
- G01 - MEASURING TESTING
Information Patent Grant
Methods and apparatus for using an optically tunable soft mask to c...
- Patent number 7,555,395
- Issue date Jun 30, 2009
- Tokyo Electron Limited
- James E. Willis
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Fault detection and classification (FDC) using a run-to-run controller
- Patent number 7,477,960
- Issue date Jan 13, 2009
- Tokyo Electron Limited
- James E. Willis
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Method for data pre-population
- Patent number 7,437,199
- Issue date Oct 14, 2008
- Tokyo Electron Limited
- James E Willis
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Creating an optically tunable anti-reflective coating
- Patent number 7,300,730
- Issue date Nov 27, 2007
- Tokyo Electron Limited
- James E. Willis
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for automatic configuration of processing system
- Patent number 7,213,478
- Issue date May 8, 2007
- Tokyo Electron Limited
- Satoshi Harada
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Glass composition determination method and apparatus
- Patent number 5,663,997
- Issue date Sep 2, 1997
- Asoma Instruments, Inc.
- James E. Willis
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
ACCURACY OF OPTICAL METROLOGY MEASUREMENTS
- Publication number 20080076046
- Publication date Mar 27, 2008
- TOKYO ELECTRON LIMITED
- James E. Willis
- G01 - MEASURING TESTING
Information Patent Application
METHODS AND APPARATUS FOR USING AN OPTICALLY TUNABLE SOFT MASK PROF...
- Publication number 20080077352
- Publication date Mar 27, 2008
- TOKYO ELECTRON LIMITED
- James E. Willis
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHODS AND APPARATUS FOR USING AN OPTICALLY TUNABLE SOFT MASK TO C...
- Publication number 20080077362
- Publication date Mar 27, 2008
- TOKYO ELECTRON LIMITED
- James E. Willis
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHODS AND APPARATUS FOR CHANGING THE OPTICAL PROPERTIES OF RESISTS
- Publication number 20080076045
- Publication date Mar 27, 2008
- TOKYO ELECTRON LIMITED
- James E. Willis
- G01 - MEASURING TESTING
Information Patent Application
ACCURACY OF OPTICAL METROLOGY MEASUREMENTS
- Publication number 20080074677
- Publication date Mar 27, 2008
- TOKYO ELECTRON LIMITED
- James E. Willis
- G01 - MEASURING TESTING
Information Patent Application
ACCURACY OF OPTICAL METROLOGY MEASUREMENTS
- Publication number 20080074678
- Publication date Mar 27, 2008
- TOKYO ELECTRON LIMITED
- James E. Willis
- G01 - MEASURING TESTING
Information Patent Application
Fault detection and classification (FDC) using a run-to-run controller
- Publication number 20060184264
- Publication date Aug 17, 2006
- TOKYO ELECTRON LIMITED
- James E. Willis
- G05 - CONTROLLING REGULATING
Information Patent Application
R2R controller to automate the data collection during a DOE
- Publication number 20060079983
- Publication date Apr 13, 2006
- TOKYO ELECTRON LIMITED
- James E. Willis
- G05 - CONTROLLING REGULATING
Information Patent Application
Method for automatic configuration of processing system
- Publication number 20050015176
- Publication date Jan 20, 2005
- TOKYO ELECTRON LIMITED
- Satoshi Harada
- G05 - CONTROLLING REGULATING
Information Patent Application
Method for data pre-population
- Publication number 20040243256
- Publication date Dec 2, 2004
- TOKYO ELECTRON LIMITED
- James E. Willis
- G05 - CONTROLLING REGULATING

James E. Willis

Person

Patents Grantslast 30 patents

Methods and apparatus for changing the optical properties of resists

Methods and apparatus for using an optically tunable soft mask to c...

Fault detection and classification (FDC) using a run-to-run controller

Method for data pre-population

Creating an optically tunable anti-reflective coating

Method for automatic configuration of processing system

Glass composition determination method and apparatus

Patents Applicationslast 30 patents

ACCURACY OF OPTICAL METROLOGY MEASUREMENTS

METHODS AND APPARATUS FOR USING AN OPTICALLY TUNABLE SOFT MASK PROF...

METHODS AND APPARATUS FOR USING AN OPTICALLY TUNABLE SOFT MASK TO C...

METHODS AND APPARATUS FOR CHANGING THE OPTICAL PROPERTIES OF RESISTS

ACCURACY OF OPTICAL METROLOGY MEASUREMENTS

ACCURACY OF OPTICAL METROLOGY MEASUREMENTS

Fault detection and classification (FDC) using a run-to-run controller

R2R controller to automate the data collection during a DOE

Method for automatic configuration of processing system

Method for data pre-population