James Ekberg

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Tempe, AZ, US

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Patents Grantslast 30 patents

Information Patent Grant
CMP apparatus and load cup mechanism
- Patent number 7,354,335
- Issue date Apr 8, 2008
- Novellus Systems, Inc.
- David T. Marquardt
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
CMP apparatus and load cup mechanism
- Publication number 20050227595
- Publication date Oct 13, 2005
- David T. Marquardt
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR