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James F. Biegen
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Middletown, CT, US
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Patents Grants
last 30 patents
Information
Patent Grant
Equal-path interferometer
Patent number
8,045,175
Issue date
Oct 25, 2011
Zygo Corporation
Peter J. De Groot
G01 - MEASURING TESTING
Information
Patent Grant
Interference objective for annular test surfaces
Patent number
7,751,064
Issue date
Jul 6, 2010
Zygo Corporation
Jan Liesener
G01 - MEASURING TESTING
Information
Patent Grant
Optical systems for measuring form and geometric dimensions of prec...
Patent number
6,822,745
Issue date
Nov 23, 2004
Zygo Corporation
Peter De Groot
G01 - MEASURING TESTING
Information
Patent Grant
Calibration standard for optical gap measuring tools
Patent number
5,724,134
Issue date
Mar 3, 1998
Zygo Corporation
Peter de Groot
G01 - MEASURING TESTING
Information
Patent Grant
Interferometric method and apparatus to measure surface topography
Patent number
5,390,023
Issue date
Feb 14, 1995
Zygo Corporation
James F. Biegen
G01 - MEASURING TESTING
Information
Patent Grant
Interferometric surface profiler for spherical surfaces
Patent number
4,948,253
Issue date
Aug 14, 1990
Zygo Corporation
James F. Biegen
G01 - MEASURING TESTING
Information
Patent Grant
Interferometric surface profiler
Patent number
4,869,593
Issue date
Sep 26, 1989
Zygo Corporation
James F. Biegen
G01 - MEASURING TESTING
Information
Patent Grant
Coating and method for testing plano and spherical wavefront produc...
Patent number
4,820,049
Issue date
Apr 11, 1989
Zygo Corporation
James F. Biegen
G01 - MEASURING TESTING
Information
Patent Grant
Interferometric surface profiler
Patent number
4,732,483
Issue date
Mar 22, 1988
Zygo Corporation
James F. Biegen
G01 - MEASURING TESTING
Patents Applications
last 30 patents
Information
Patent Application
Equal-Path Interferometer
Publication number
20110007323
Publication date
Jan 13, 2011
Zygo Corporation
Peter J. De Groot
G02 - OPTICS
Information
Patent Application
INTERFERENCE OBJECTIVE FOR ANNULAR TEST SURFACES
Publication number
20090185195
Publication date
Jul 23, 2009
Jan Liesener
G01 - MEASURING TESTING
Information
Patent Application
Optical systems for measuring form and geometric dimensions of prec...
Publication number
20010043333
Publication date
Nov 22, 2001
Peter De Groot
G01 - MEASURING TESTING