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James F. Lee
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Chandler, AZ, US
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Patents Grants
last 30 patents
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Patent Grant
Workpiece carrier with adjustable pressure zones and barriers
Patent number
6,746,318
Issue date
Jun 8, 2004
SpeedFam-IPEC Corporation
Daniel S. Mallery
B24 - GRINDING POLISHING
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Patent Grant
Carrier including a multi-volume diaphragm for polishing a semicond...
Patent number
6,447,379
Issue date
Sep 10, 2002
SpeedFam-IPEC Corporation
Robert D. Gromko
B24 - GRINDING POLISHING
Patents Applications
last 30 patents
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Patent Application
Workpiece carrier with adjustable pressure zones and barriers
Publication number
20030073381
Publication date
Apr 17, 2003
SpeedFam-IPEC Corporation
Daniel S. Mallery
B24 - GRINDING POLISHING