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James Fong
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Cupertino, CA, US
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last 30 patents
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Patent Grant
Method and system for improving particle beam lithography
Patent number
7,897,522
Issue date
Mar 1, 2011
Cadence Design Systems, Inc.
Akira Fujimura
B82 - NANO-TECHNOLOGY
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last 30 patents
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Patent Application
Method and system for improving particle beam lithography
Publication number
20080116399
Publication date
May 22, 2008
Cadence Design Systems, Inc.
Akira Fujimura
B82 - NANO-TECHNOLOGY