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Positive displacement pump system
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Patent number 5,437,542
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Issue date Aug 1, 1995
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MKS Instruments, Inc.
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James H. Ewing
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F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
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Liquid pump and vaporizer
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Patent number 5,361,800
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Issue date Nov 8, 1994
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MKS Instruments, Inc.
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James H. Ewing
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F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
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Modulating positive shutoff mechanism
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Patent number 5,040,559
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Issue date Aug 20, 1991
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MKS Instruments, Inc.
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James H. Ewing
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F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
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Balanced solenoid valves
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Patent number 4,796,854
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Issue date Jan 10, 1989
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MKS Instruments, Inc.
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James H. Ewing
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F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
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Flowmeter-controlled valving
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Patent number 4,679,585
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Issue date Jul 14, 1987
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MKS Instruments, Inc.
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James H. Ewing
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G05 - CONTROLLING REGULATING
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Thermal mass flowmetering
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Patent number 4,464,932
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Issue date Aug 14, 1984
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MKS Instruments, Inc.
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James H. Ewing
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G01 - MEASURING TESTING
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Linearized controlled valves
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Patent number 4,327,894
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Issue date May 4, 1982
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MKS Instruments, Inc.
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James H. Ewing
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F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
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Vacuum monitoring
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Patent number 4,008,619
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Issue date Feb 22, 1977
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MKS Instruments, Inc.
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H. David Alcaide
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G01 - MEASURING TESTING