Membership
Tour
Register
Log in
James M. Cahill, Jr.
Follow
Person
San Jose, CA, US
People
Overview
Industries
Organizations
People
Information
Impact
Patents Grants
last 30 patents
Information
Patent Grant
Wafer metrology apparatus and method
Patent number
6,919,958
Issue date
Jul 19, 2005
Therma-Wave, Inc.
Fred E. Stanke
B24 - GRINDING POLISHING