James M. Cahill

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San Jose, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Apparatus for imaging metrology
- Patent number 7,177,019
- Issue date Feb 13, 2007
- Tokyo Electron Limited
- Fred E. Stanke
- B24 - GRINDING POLISHING
Information Patent Grant
Apparatus for imaging metrology
- Patent number 7,042,580
- Issue date May 9, 2006
- Tokyo Electron Limited
- Fred E. Stanke
- B24 - GRINDING POLISHING
Information Patent Grant
Wafer metrology apparatus and method
- Patent number 6,563,586
- Issue date May 13, 2003
- Therma-Wave, Inc.
- Fred E. Stanke
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
Apparatus for imaging metrology
- Publication number 20050128490
- Publication date Jun 16, 2005
- Fred E. Stanke
- B24 - GRINDING POLISHING
Information Patent Application
Wafer metrology apparatus and method
- Publication number 20030184742
- Publication date Oct 2, 2003
- Fred E. Stanke
- B24 - GRINDING POLISHING
Information Patent Application
Optical critical dimension metrology system integrated into semicon...
- Publication number 20020018217
- Publication date Feb 14, 2002
- Michael Weber-Grabau
- G01 - MEASURING TESTING