James M. Marks

Follow

Person

Saline, MI, US

People

Patents Grantslast 30 patents

Information Patent Grant
Ultra-miniature optical pressure sensing system
- Patent number 6,868,736
- Issue date Mar 22, 2005
- Sentec Corporation
- Takeo Sawatari
- G01 - MEASURING TESTING
Information Patent Grant
Holographic scatterometer for detection and analysis of wafer surfa...
- Patent number 6,597,446
- Issue date Jul 22, 2003
- Sentec Corporation
- Alex Klooster
- G01 - MEASURING TESTING
Information Patent Grant
Heterodyne scatterometer for detecting and analyzing wafer surface...
- Patent number 5,923,423
- Issue date Jul 13, 1999
- Sentec Corporation
- Takeo Sawatari
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
Ultra-miniature optical pressure sensing system
- Publication number 20030159518
- Publication date Aug 28, 2003
- Takeo Sawatari
- G02 - OPTICS
Information Patent Application
Holographic scatterometer for detection and analysis of wafer surfa...
- Publication number 20020159052
- Publication date Oct 31, 2002
- Alex Klooster
- G01 - MEASURING TESTING