James M. Mullins

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Austin, TX, US

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Patents Grantslast 30 patents

Information Patent Grant
Apparatus and method for dynamically mixing slurry for chemical mec...
- Patent number 5,750,440
- Issue date May 12, 1998
- Motorola, Inc.
- James F. Vanell
- B24 - GRINDING POLISHING
Information Patent Grant
Measuring slurry particle size during substrate polishing
- Patent number 5,710,069
- Issue date Jan 20, 1998
- Motorola, Inc.
- Janos Farkas
- B24 - GRINDING POLISHING
Information Patent Grant
Method for using rinse spray bar in chemical mechanical polishing
- Patent number 5,578,529
- Issue date Nov 26, 1996
- Motorola Inc.
- James M. Mullins
- B08 - CLEANING
Information Patent Grant
Preconditioner for a polishing pad and method for using the same
- Patent number 5,527,424
- Issue date Jun 18, 1996
- Motorola, Inc.
- James M. Mullins
- B24 - GRINDING POLISHING