James P. Garcia

Person

Santa Clara, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Methods for processing a substrate with a flow controlled meniscus
- Patent number 7,862,663
- Issue date Jan 4, 2011
- Lam Research Corporation
- James P. Garcia
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Apparatus and method for processing a substrate
- Patent number 7,520,285
- Issue date Apr 21, 2009
- Lam Research Corporation
- James P. Garcia
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-menisci processing apparatus
- Patent number 7,464,719
- Issue date Dec 16, 2008
- Lam Research Corporation
- James P. Garcia
- B08 - CLEANING
Information Patent Grant
System processing a substrate using dynamic liquid meniscus
- Patent number 7,395,611
- Issue date Jul 8, 2008
- Lam Research Corporation
- James P. Garcia
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Proximity meniscus manifold
- Patent number 7,389,783
- Issue date Jun 24, 2008
- Lam Research Corporation
- Carl Woods
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Methods for drying semiconductor wafer surfaces using a plurality o...
- Patent number 7,387,689
- Issue date Jun 17, 2008
- Lam Research Corporation
- John M. de Larios
- B08 - CLEANING
Information Patent Grant
Meniscus, vacuum, IPA vapor, drying manifold
- Patent number 7,383,844
- Issue date Jun 10, 2008
- Lam Research Corporation
- Carl Woods
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Meniscus proximity system for cleaning semiconductor substrate surf...
- Patent number 7,350,316
- Issue date Apr 1, 2008
- Lam Research Corporation
- Carl Woods
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for drying semiconductor wafer surfaces using...
- Patent number 7,234,477
- Issue date Jun 26, 2007
- Lam Research Corporation
- John M. de Larios
- B08 - CLEANING
Information Patent Grant
Meniscus, vacuum, IPA vapor, drying manifold
- Patent number 7,198,055
- Issue date Apr 3, 2007
- Lam Research Corporation
- Carl Woods
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and systems for processing a bevel edge of a substrate usin...
- Patent number 7,192,488
- Issue date Mar 20, 2007
- Lam Research Corporation
- Carl A. Woods
- B08 - CLEANING
Information Patent Grant
System and method for modulating flow through multiple ports in a p...
- Patent number 7,143,527
- Issue date Dec 5, 2006
- Lam Research Corporation
- James P. Garcia
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and systems for processing a substrate using a dynamic liqu...
- Patent number 7,127,831
- Issue date Oct 31, 2006
- Lam Research Corporation
- James P. Garcia
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vertical proximity processor
- Patent number 7,069,937
- Issue date Jul 4, 2006
- Lam Research Corporation
- James P. Garcia
- B08 - CLEANING
Information Patent Grant
System and method for modulating flow through multiple ports in a p...
- Patent number 7,003,899
- Issue date Feb 28, 2006
- Lam Research Corporation
- James P. Garcia
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and systems for processing a bevel edge of a substrate usin...
- Patent number 7,000,622
- Issue date Feb 21, 2006
- Lam Research Corporation
- Carl A. Woods
- B08 - CLEANING
Information Patent Grant
Methods and systems for processing a substrate using a dynamic liqu...
- Patent number 6,988,327
- Issue date Jan 24, 2006
- Lam Research Corporation
- James P. Garcia
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer bevel edge cleaning system and apparatus
- Patent number 6,910,240
- Issue date Jun 28, 2005
- Lam Research Corporation
- John M. Boyd
- G11 - INFORMATION STORAGE
Information Patent Grant
Substrate processing using a fluid re-circulation system in a wafer...
- Patent number 6,851,436
- Issue date Feb 8, 2005
- Lam Research Corporation
- Michael Ravkin
- B08 - CLEANING
Information Patent Grant
Method of planarizing a semiconductor device using a high density p...
- Patent number 6,593,241
- Issue date Jul 15, 2003
- Applied Materials Inc.
- Thomas Abraham
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Methods for processing a substrate with a flow controlled meniscus
- Publication number 20090176360
- Publication date Jul 9, 2009
- Lam Research Corp.
- James P. Garcia
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Apparatus for dispensing precise volumes of fluid
- Publication number 20090037028
- Publication date Feb 5, 2009
- James P. Garcia
- G05 - CONTROLLING REGULATING
Information Patent Application
METHODS FOR DRYING SEMICONDUCTOR WAFER SURFACES USING A PLURALITY O...
- Publication number 20070218653
- Publication date Sep 20, 2007
- John M. de Larios
- B08 - CLEANING
Information Patent Application
MENISCUS PROXIMITY SYSTEM FOR CLEANING SEMICONDUCTOR SUBSTRATE SURF...
- Publication number 20070107756
- Publication date May 17, 2007
- Carl Woods
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Apparatus for dispensing precise volumes of fluid
- Publication number 20070032910
- Publication date Feb 8, 2007
- Lam Research Corporation
- James P. Garcia
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
Meniscus, vacuum, IPA vapor, drying manifold
- Publication number 20070023070
- Publication date Feb 1, 2007
- Lam Research Corp.
- Carl Woods
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Methods and systems for processing a substrate using a dynamic liqu...
- Publication number 20070011905
- Publication date Jan 18, 2007
- LAM RESEARCH CORPORATION
- James P. Garcia
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Multi-menisci processing apparatus
- Publication number 20060207636
- Publication date Sep 21, 2006
- Lam Research Corp.
- James P. Garcia
- B08 - CLEANING
Information Patent Application
Methods and systems for processing a substrate using a dynamic liqu...
- Publication number 20060150435
- Publication date Jul 13, 2006
- LAM RESEARCH CORPORATION
- James P. Garcia
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Methods and systems for processing a bevel edge of a substrate usin...
- Publication number 20060081270
- Publication date Apr 20, 2006
- LAM RESEARCH CORPORATION
- Carl A. Woods
- B08 - CLEANING
Information Patent Application
Apparatus for dispensing precise volumes of fluid
- Publication number 20060074529
- Publication date Apr 6, 2006
- James P. Garcia
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
System and method for modulating flow through multiple ports in a p...
- Publication number 20060064895
- Publication date Mar 30, 2006
- LAM RESEARCH CORPORATION
- James P. Garcia
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Apparatus and method for processing a substrate
- Publication number 20060005860
- Publication date Jan 12, 2006
- Lam Research Corp.
- James P. Garcia
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Self-draining edge wheel system and method
- Publication number 20060000494
- Publication date Jan 5, 2006
- LAM RESEARCH CORPORATION
- James P. Garcia
- B08 - CLEANING
Information Patent Application
Proximity meniscus manifold
- Publication number 20050139318
- Publication date Jun 30, 2005
- Lam Research Corp.
- Carl Woods
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Methods and systems for processing a bevel edge of a substrate usin...
- Publication number 20040069326
- Publication date Apr 15, 2004
- LAM RESEARCH CORPORATION
- Carl A. Woods
- B08 - CLEANING
Information Patent Application
Method and apparatus for drying semiconductor wafer surfaces using...
- Publication number 20040069329
- Publication date Apr 15, 2004
- Lam Research Corp.
- John M. de Larios
- B08 - CLEANING
Information Patent Application
Vertical proximity processor
- Publication number 20040060581
- Publication date Apr 1, 2004
- Lam Research Corp.
- James P. Garcia
- B08 - CLEANING
Information Patent Application
Methods and systems for processing a substrate using a dynamic Liqu...
- Publication number 20040060195
- Publication date Apr 1, 2004
- LAM RESEARCH CORPORATION
- James P. Garcia
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR

James P. Garcia

Person

Patents Grantslast 30 patents

Methods for processing a substrate with a flow controlled meniscus

Apparatus and method for processing a substrate

Multi-menisci processing apparatus

System processing a substrate using dynamic liquid meniscus

Proximity meniscus manifold

Methods for drying semiconductor wafer surfaces using a plurality o...

Meniscus, vacuum, IPA vapor, drying manifold

Meniscus proximity system for cleaning semiconductor substrate surf...

Method and apparatus for drying semiconductor wafer surfaces using...

Meniscus, vacuum, IPA vapor, drying manifold

Methods and systems for processing a bevel edge of a substrate usin...

System and method for modulating flow through multiple ports in a p...

Methods and systems for processing a substrate using a dynamic liqu...

Vertical proximity processor

System and method for modulating flow through multiple ports in a p...

Methods and systems for processing a bevel edge of a substrate usin...

Methods and systems for processing a substrate using a dynamic liqu...

Wafer bevel edge cleaning system and apparatus

Substrate processing using a fluid re-circulation system in a wafer...

Method of planarizing a semiconductor device using a high density p...

Patents Applicationslast 30 patents

Methods for processing a substrate with a flow controlled meniscus

Apparatus for dispensing precise volumes of fluid

METHODS FOR DRYING SEMICONDUCTOR WAFER SURFACES USING A PLURALITY O...

MENISCUS PROXIMITY SYSTEM FOR CLEANING SEMICONDUCTOR SUBSTRATE SURF...

Apparatus for dispensing precise volumes of fluid

Meniscus, vacuum, IPA vapor, drying manifold

Methods and systems for processing a substrate using a dynamic liqu...

Multi-menisci processing apparatus

Methods and systems for processing a substrate using a dynamic liqu...

Methods and systems for processing a bevel edge of a substrate usin...

Apparatus for dispensing precise volumes of fluid

System and method for modulating flow through multiple ports in a p...

Apparatus and method for processing a substrate

Self-draining edge wheel system and method

Proximity meniscus manifold

Methods and systems for processing a bevel edge of a substrate usin...

Method and apparatus for drying semiconductor wafer surfaces using...

Vertical proximity processor

Methods and systems for processing a substrate using a dynamic Liqu...