James R. BOWERS

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Brookfield, CT, US

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Patents Grantslast 30 patents

Information Patent Grant
Silicon on insulator etch
- Patent number 8,906,248
- Issue date Dec 9, 2014
- Lam Research Corporation
- Siyi Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Unique process chemistry for etching organic low-k materials
- Patent number 6,841,483
- Issue date Jan 11, 2005
- Lam Research Corporation
- Helen H. Zhu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of plasma etching of silicon carbide
- Patent number 6,670,278
- Issue date Dec 30, 2003
- Lam Research Corporation
- Si Yi Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma etching of organic antireflective coating
- Patent number 6,630,407
- Issue date Oct 7, 2003
- Lam Research Corporation
- Douglas Keil
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SILICON ON INSULATOR ETCH
- Publication number 20130149869
- Publication date Jun 13, 2013
- LAM RESEARCH CORPORATION
- Siyi LI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of plasma etching of silicon carbide
- Publication number 20020177322
- Publication date Nov 28, 2002
- Si Yi Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Plasma etching of organic antireflective coating
- Publication number 20020173160
- Publication date Nov 21, 2002
- Douglas Keil
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Unique process chemistry for etching organic low-k materials
- Publication number 20020111036
- Publication date Aug 15, 2002
- Lam Research Corporation
- Helen H. Zhu
- H01 - BASIC ELECTRIC ELEMENTS