James R. Zibrida

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Portland, OR, US

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Patents Grantslast 30 patents

Information Patent Grant
Remote detection of plating on wafer holding apparatus
- Patent number 10,416,092
- Issue date Sep 17, 2019
- Lam Research Corporation
- Rajan Arora
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Wafer electroplating apparatus for reducing edge defects
- Patent number 8,172,992
- Issue date May 8, 2012
- Novellus Systems, Inc.
- Vinay Prabhakar
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR

Patents Applicationslast 30 patents

Information Patent Application
REMOTE DETECTION OF PLATING ON WAFER HOLDING APPARATUS
- Publication number 20170299524
- Publication date Oct 19, 2017
- LAM RESEARCH CORPORATION
- Rajan Arora
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
WAFER ELECTROPLATING APPARATUS FOR REDUCING EDGE DEFECTS
- Publication number 20120181170
- Publication date Jul 19, 2012
- Vinay Prabhakar
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
WAFER ELECTROPLATING APPARATUS FOR REDUCING EDGE DEFECTS
- Publication number 20100155254
- Publication date Jun 24, 2010
- Vinay Prabhakar
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR