James S. Sims

Person

Tigard, OR, US

People

Patents Grantslast 30 patents

Information Patent Grant
Conformal damage-free encapsulation of chalcogenide materials
- Patent number 11,832,533
- Issue date Nov 28, 2023
- Lam Research Corporation
- James Samuel Sims
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Conformal damage-free encapsulation of chalcogenide materials
- Patent number 11,239,420
- Issue date Feb 1, 2022
- Lam Research Corporation
- James Samuel Sims
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Suppressing interfacial reactions by varying the wafer temperature...
- Patent number 11,075,127
- Issue date Jul 27, 2021
- Lam Research Corporation
- Seshasayee Varadarajan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Suppressing interfacial reactions by varying the wafer temperature...
- Patent number 10,347,547
- Issue date Jul 9, 2019
- Lam Research Corporation
- Seshasayee Varadarajan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for depositing ALD films using halide-based precursors
- Patent number 10,020,188
- Issue date Jul 10, 2018
- Lam Research Corporation
- James S. Sims
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Nitride film formed by plasma-enhanced and thermal atomic layer dep...
- Patent number 9,865,455
- Issue date Jan 9, 2018
- Lam Research Corporation
- James Samuel Sims
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for depositing metals free ald silicon nitride films using h...
- Patent number 9,824,884
- Issue date Nov 21, 2017
- Lam Research Corporation
- James S. Sims
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Tensile dielectric films using UV curing
- Patent number 9,659,769
- Issue date May 23, 2017
- Novellus Systems, Inc.
- Bhadri Varadarajan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for supplying vaporized precursor
- Patent number 9,637,821
- Issue date May 2, 2017
- Lam Research Corporation
- Damien Slevin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Contoured showerhead for improved plasma shaping and control
- Patent number 9,598,770
- Issue date Mar 21, 2017
- Novellus Systems, Inc.
- Karl F. Leeser
- G05 - CONTROLLING REGULATING
Information Patent Grant
Method of depositing ammonia free and chlorine free conformal silic...
- Patent number 9,589,790
- Issue date Mar 7, 2017
- Lam Research Corporation
- Jon Henri
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Contoured showerhead for improved plasma shaping and control
- Patent number 9,315,899
- Issue date Apr 19, 2016
- Novellus Systems, Inc.
- Karl F. Leeser
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Methods and apparatuses for uniform reduction of the in-feature wet...
- Patent number 9,214,333
- Issue date Dec 15, 2015
- Lam Research Corporation
- James S. Sims
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma enhanced atomic layer deposition with pulsed plasma exposure
- Patent number 9,076,646
- Issue date Jul 7, 2015
- Lam Research Corporation
- James S. Sims
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Precursor vapor generation and delivery system with filters and fil...
- Patent number 8,628,618
- Issue date Jan 14, 2014
- Novellus Systems Inc.
- Damien Slevin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cascaded cure approach to fabricate highly tensile silicon nitride...
- Patent number 8,512,818
- Issue date Aug 20, 2013
- Novellus Systems, Inc.
- Bhadri Varadarajan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
High compressive stress carbon liners for MOS devices
- Patent number 8,362,571
- Issue date Jan 29, 2013
- Novellus Systems, Inc.
- Qingguo Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cascaded cure approach to fabricate highly tensile silicon nitride...
- Patent number 8,211,510
- Issue date Jul 3, 2012
- Novellus Systems, Inc.
- Bhadri Varadarajan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for making high stress boron-doped carbon films
- Patent number 7,998,881
- Issue date Aug 16, 2011
- Novellus Systems, Inc.
- Qingguo Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High compressive stress carbon liners for MOS devices
- Patent number 7,906,817
- Issue date Mar 15, 2011
- Novellus Systems, Inc.
- Qingguo Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for improving process control and film conformality of PECVD...
- Patent number 7,745,346
- Issue date Jun 29, 2010
- Novellus Systems, Inc.
- Dennis Hausmann
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
PMOS transistor with compressive dielectric capping layer
- Patent number 7,327,001
- Issue date Feb 5, 2008
- Novellus Systems, Inc.
- Akhil Singhal
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
PMOS transistor with compressive dielectric capping layer
- Patent number 7,214,630
- Issue date May 8, 2007
- Novellus Systems, Inc.
- Bhadri N. Varadarajan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Strained transistor architecture and method
- Patent number 7,041,543
- Issue date May 9, 2006
- Novellus Systems, Inc.
- Bhadri Varadarajan
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
CONFORMAL DAMAGE-FREE ENCAPSULATION OF CHALCOGENIDE MATERIALS
- Publication number 20220115592
- Publication date Apr 14, 2022
- LAM RESEARCH CORPORATION
- James Samuel Sims
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF DEPOSITING SILICON NITRIDE FILMS
- Publication number 20210384028
- Publication date Dec 9, 2021
- LAM RESEARCH CORPORATION
- James S. SIMS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUPPRESSING INTERFACIAL REACTIONS BY VARYING THE WAFER TEMPERATURE...
- Publication number 20200066607
- Publication date Feb 27, 2020
- LAM RESEARCH CORPORATION
- Seshasayee Varadarajan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CONFORMAL DAMAGE-FREE ENCAPSULATION OF CHALCOGENIDE MATERIALS
- Publication number 20200066987
- Publication date Feb 27, 2020
- LAM RESEARCH CORPORATION
- James Samuel Sims
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR DEPOSITING ALD FILMS USING HALIDE-BASED PRECURSORS
- Publication number 20180102245
- Publication date Apr 12, 2018
- LAM RESEARCH CORPORATION
- James S. Sims
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUPPRESSING INTERFACIAL REACTIONS BY VARYING THE WAFER TEMPERATURE...
- Publication number 20180047645
- Publication date Feb 15, 2018
- LAM RESEARCH CORPORATION
- Seshasayee Varadarajan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CONTOURED SHOWERHEAD FOR IMPROVED PLASMA SHAPING AND CONTROL
- Publication number 20160203953
- Publication date Jul 14, 2016
- Novellus Systems, Inc.
- Karl F. Leeser
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF DEPOSITING AMMONIA FREE AND CHLORINE FREE CONFORMAL SILIC...
- Publication number 20160148806
- Publication date May 26, 2016
- LAM RESEARCH CORPORATION
- Jon Henri
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA ENHANCED ATOMIC LAYER DEPOSITION WITH PULSED PLASMA EXPOSURE
- Publication number 20140113457
- Publication date Apr 24, 2014
- James S. Sims
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR SUPPLYING VAPORIZED PRECURSOR
- Publication number 20140096834
- Publication date Apr 10, 2014
- LAM RESEARCH CORPORATION
- Damien Slevin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CONTOURED SHOWERHEAD FOR IMPROVED PLASMA SHAPING AND CONTROL
- Publication number 20130334344
- Publication date Dec 19, 2013
- Karl F. Leeser
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
PRECURSOR VAPOR GENERATION AND DELIVERY SYSTEM WITH FILTERS AND FIL...
- Publication number 20110111136
- Publication date May 12, 2011
- NOVELLUS SYSTEMS INC.
- Damien Slevin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR IMPROVING PROCESS CONTROL AND FILM CONFORMALITY OF PECVD...
- Publication number 20100099271
- Publication date Apr 22, 2010
- Novellus Systems, Inc.
- Dennis Hausmann
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

James S. Sims

Person

Patents Grantslast 30 patents

Conformal damage-free encapsulation of chalcogenide materials

Conformal damage-free encapsulation of chalcogenide materials

Suppressing interfacial reactions by varying the wafer temperature...

Suppressing interfacial reactions by varying the wafer temperature...

Method for depositing ALD films using halide-based precursors

Nitride film formed by plasma-enhanced and thermal atomic layer dep...

Method for depositing metals free ald silicon nitride films using h...

Tensile dielectric films using UV curing

Method for supplying vaporized precursor

Contoured showerhead for improved plasma shaping and control

Method of depositing ammonia free and chlorine free conformal silic...

Contoured showerhead for improved plasma shaping and control

Methods and apparatuses for uniform reduction of the in-feature wet...

Plasma enhanced atomic layer deposition with pulsed plasma exposure

Precursor vapor generation and delivery system with filters and fil...

Cascaded cure approach to fabricate highly tensile silicon nitride...

High compressive stress carbon liners for MOS devices

Cascaded cure approach to fabricate highly tensile silicon nitride...

Method for making high stress boron-doped carbon films

High compressive stress carbon liners for MOS devices

Method for improving process control and film conformality of PECVD...

PMOS transistor with compressive dielectric capping layer

PMOS transistor with compressive dielectric capping layer

Strained transistor architecture and method

Patents Applicationslast 30 patents

CONFORMAL DAMAGE-FREE ENCAPSULATION OF CHALCOGENIDE MATERIALS

METHOD OF DEPOSITING SILICON NITRIDE FILMS

SUPPRESSING INTERFACIAL REACTIONS BY VARYING THE WAFER TEMPERATURE...

CONFORMAL DAMAGE-FREE ENCAPSULATION OF CHALCOGENIDE MATERIALS

METHOD FOR DEPOSITING ALD FILMS USING HALIDE-BASED PRECURSORS

SUPPRESSING INTERFACIAL REACTIONS BY VARYING THE WAFER TEMPERATURE...

CONTOURED SHOWERHEAD FOR IMPROVED PLASMA SHAPING AND CONTROL

METHOD OF DEPOSITING AMMONIA FREE AND CHLORINE FREE CONFORMAL SILIC...

PLASMA ENHANCED ATOMIC LAYER DEPOSITION WITH PULSED PLASMA EXPOSURE

METHOD FOR SUPPLYING VAPORIZED PRECURSOR

CONTOURED SHOWERHEAD FOR IMPROVED PLASMA SHAPING AND CONTROL

PRECURSOR VAPOR GENERATION AND DELIVERY SYSTEM WITH FILTERS AND FIL...

METHOD FOR IMPROVING PROCESS CONTROL AND FILM CONFORMALITY OF PECVD...