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James T. McWhirter
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San Jose, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Method of laser annealing a semiconductor wafer with localized cont...
Patent number
9,613,828
Issue date
Apr 4, 2017
Ultratech, Inc.
James McWhirter
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Systems and methods for reducing beam instability in laser annealing
Patent number
9,559,023
Issue date
Jan 31, 2017
Ultratech, Inc.
James T. McWhirter
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Dual-loop control for laser annealing of semiconductor wafers
Patent number
9,475,150
Issue date
Oct 25, 2016
Ultratech, Inc.
James T. McWhirter
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Movable microchamber system with gas curtain
Patent number
9,029,809
Issue date
May 12, 2015
Ultratech, Inc.
Digby Pun
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Systems and methods for forming a time-averaged line image
Patent number
8,822,353
Issue date
Sep 2, 2014
Ultratech, Inc.
Serguei Anikitchev
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Dual-loop control for laser annealing of semiconductor wafers
Patent number
8,691,598
Issue date
Apr 8, 2014
Ultratech, Inc.
James T. McWhirter
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Systems and methods for forming a time-averaged line image
Patent number
8,399,808
Issue date
Mar 19, 2013
Ultratech, Inc.
Serguei Anikitchev
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Systems and methods for forming a time-averaged line image
Patent number
8,026,519
Issue date
Sep 27, 2011
Ultratech, Inc.
Serguei Anikitchev
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Methods and systems for preparing a sample for thin film analysis
Patent number
7,190,441
Issue date
Mar 13, 2007
KLA-Tencor Technologies Corp.
James T. McWhirter
G01 - MEASURING TESTING
Patents Applications
last 30 patents
Information
Patent Application
Microchamber laser processing systems and methods using localized p...
Publication number
20160354865
Publication date
Dec 8, 2016
Ultratech, Inc.
James T. McWhirter
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Method of laser annealing a semiconductor wafer with localized cont...
Publication number
20160343583
Publication date
Nov 24, 2016
Ultratech, Inc.
James McWhirter
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Systems and methods for reducing beam instability in laser annealing
Publication number
20150371911
Publication date
Dec 24, 2015
Ultratech, Inc.
James T. McWhirter
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Dual-loop control for laser annealing of semiconductor wafers
Publication number
20140166632
Publication date
Jun 19, 2014
Ultratech, Inc.
JAMES T. MCWHIRTER
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Movable microchamber system with gas curtain
Publication number
20140151344
Publication date
Jun 5, 2014
Ultratech, Inc.
Digby PUN
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Thermal Processing of Substrates with Pre- and Post-Spike Temperatu...
Publication number
20120111838
Publication date
May 10, 2012
Ultratech, Inc.
Arthur W. Zafiropoulo
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Systems and methods for forming a time-averaged line image
Publication number
20120100640
Publication date
Apr 26, 2012
ULTRATECH, INC.
Serguei Anikitchev
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Systems and methods for forming a time-averaged line image
Publication number
20120100728
Publication date
Apr 26, 2012
Serguei Anikitchev
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Thermal Processing of Substrates with Pre- and Post-Spike Temperatu...
Publication number
20110298093
Publication date
Dec 8, 2011
Ultratech, Inc.
Arthur W. Zafiropoulo
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Thermal processing of substrates with pre- and post-spike temperatu...
Publication number
20100084744
Publication date
Apr 8, 2010
Arthur W. Zafiropoulo
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR