James Tappan

Person

Fremont, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Plasma processing devices having multi-port valve assemblies
- Patent number 12,100,575
- Issue date Sep 24, 2024
- Lam Research Corporation
- Daniel A. Brown
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for spatial and temporal control of temperature on a subs...
- Patent number 11,302,556
- Issue date Apr 12, 2022
- Lam Research Corporation
- Anthony J. Ricci
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Chamber with vertical support stem for symmetric conductance and RF...
- Patent number 10,665,435
- Issue date May 26, 2020
- Lam Research Corporation
- Daniel Arthur Brown
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for spatial and temporal control of temperature on a subs...
- Patent number 10,636,689
- Issue date Apr 28, 2020
- Lam Research Corporation
- Anthony J. Ricci
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Chamber with vertical support stem for symmetric conductance and RF...
- Patent number 10,395,902
- Issue date Aug 27, 2019
- Lam Research Corporation
- Daniel Arthur Brown
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Chamber with vertical support stem for symmetric conductance and RF...
- Patent number 10,049,862
- Issue date Aug 14, 2018
- Lam Research Corporation
- Daniel Arthur Brown
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing devices having multi-port valve assemblies
- Patent number 10,037,869
- Issue date Jul 31, 2018
- Lam Research Corporation
- Daniel A. Brown
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Floating collar clamping device for auto-aligning nut and screw in...
- Patent number 9,103,416
- Issue date Aug 11, 2015
- Lam Research Corporation
- James E. Tappan
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Plasma processing systems with mechanisms for controlling temperatu...
- Patent number 8,900,404
- Issue date Dec 2, 2014
- Lam Research Corporation
- James Tappan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for spatial and temporal control of temperature on a subs...
- Patent number 8,821,639
- Issue date Sep 2, 2014
- Lam Research Corporation
- Anthony J. Ricci
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method for spatial and temporal control of temperature on a substrate
- Patent number 8,735,298
- Issue date May 27, 2014
- Lam Research Corporation
- Anthony J. Ricci
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Adjustable gap capacitively coupled RF plasma reactor including lat...
- Patent number 8,735,765
- Issue date May 27, 2014
- Lam Research Corporation
- James E. Tappan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Adjustable gap capacitively coupled RF plasma reactor including lat...
- Patent number 8,552,334
- Issue date Oct 8, 2013
- Lam Research Corporation
- James E. Tappan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Floating collar clamping device for auto-aligning nut and screw in...
- Patent number 8,438,712
- Issue date May 14, 2013
- Lam Research Corporation
- James E. Tappan
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Electrode orientation and parallelism adjustment mechanism for plas...
- Patent number 8,394,233
- Issue date Mar 12, 2013
- Lam Research Corporation
- James E. Tappan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrode orientation and parallelism adjustment mechanism for plas...
- Patent number 8,257,548
- Issue date Sep 4, 2012
- Lam Research Corporation
- James E. Tappan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing apparatus for spatial and temporal control...
- Patent number 8,051,556
- Issue date Nov 8, 2011
- Lam Research Corporation
- Anthony J. Ricci
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Apparatus for spatial and temporal control of temperature on a subs...
- Patent number 8,038,796
- Issue date Oct 18, 2011
- Lam Research Corporation
- Anthony J. Ricci
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method of protecting a bond layer in a substrate support adapted fo...
- Patent number 7,998,296
- Issue date Aug 16, 2011
- Lam Research Corporation
- Tony Ricci
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of protecting a bond layer in a substrate support adapted fo...
- Patent number 7,431,788
- Issue date Oct 7, 2008
- Lam Research Corporation
- Anthony Ricci
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Reaction chamber design to minimize particle generation in chemical...
- Patent number 5,368,646
- Issue date Nov 29, 1994
- Lam Research Corporation
- Arthur K. Yasuda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Reaction chamber design and method to minimize particle generation...
- Patent number 5,200,232
- Issue date Apr 6, 1993
- Lam Research Corporation
- James E. Tappan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SEMICONDUCTOR PROCESSING CHAMBER WITH DUAL-LIFT MECHANISM FOR EDGE...
- Publication number 20220415702
- Publication date Dec 29, 2022
- LAM RESEARCH CORPORATION
- John Stephen Drewery
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
AUTOMATED PROCESS MODULE RING POSITIONING AND REPLACEMENT
- Publication number 20220122878
- Publication date Apr 21, 2022
- LAM RESEARCH CORPORATION
- Joanna Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR SPATIAL AND TEMPORAL CONTROL OF TEMPERATURE ON A SUBS...
- Publication number 20200251370
- Publication date Aug 6, 2020
- LAM RESEARCH CORPORATION
- Anthony J. Ricci
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
CHAMBER WITH VERTICAL SUPPORT STEM FOR SYMMETRIC CONDUCTANCE AND RF...
- Publication number 20190371579
- Publication date Dec 5, 2019
- LAM RESEARCH CORPORATION
- Daniel Arthur Brown
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHAMBER WITH VERTICAL SUPPORT STEM FOR SYMMETRIC CONDUCTANCE AND RF...
- Publication number 20180323044
- Publication date Nov 8, 2018
- LAM RESEARCH CORPORATION
- Daniel Arthur Brown
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING DEVICES HAVING MULTI-PORT VALVE ASSEMBLIES
- Publication number 20180323041
- Publication date Nov 8, 2018
- LAM RESEARCH CORPORATION
- Daniel A. Brown
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHAMBER WITH VERTICAL SUPPORT STEM FOR SYMMETRIC CONDUCTANCE AND RF...
- Publication number 20160307743
- Publication date Oct 20, 2016
- LAM RESEARCH CORPORATION
- Daniel Arthur Brown
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING DEVICES HAVING MULTI-PORT VALVE ASSEMBLIES
- Publication number 20160033977
- Publication date Feb 4, 2016
- LAM RESEARCH CORPORATION
- Daniel A. Brown
- G05 - CONTROLLING REGULATING
Information Patent Application
APPARATUS FOR SPATIAL AND TEMPORAL CONTROL OF TEMPERATURE ON A SUBS...
- Publication number 20140332161
- Publication date Nov 13, 2014
- Anthony J. Ricci
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ADJUSTABLE GAP CAPACITIVELY COUPLED RF PLASMA REACTOR INCLUDING LAT...
- Publication number 20130340938
- Publication date Dec 26, 2013
- LAM RESEARCH CORPORATION
- James E. Tappan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FLOATING COLLAR CLAMPING DEVICE FOR AUTO-ALIGNING NUT AND SCREW IN...
- Publication number 20130333498
- Publication date Dec 19, 2013
- James E. Tappan
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Application
APPARATUS FOR SPATIAL AND TEMPORAL CONTROL OF TEMPERATURE ON A SUBS...
- Publication number 20130072024
- Publication date Mar 21, 2013
- LAM RESEARCH CORPORATION
- Anthony J. Ricci
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRODE ORIENTATION AND PARALLELISM ADJUSTMENT MECHANISM FOR PLAS...
- Publication number 20120291954
- Publication date Nov 22, 2012
- LAM RESEARCH CORPORATION
- James E. Tappan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR SPATIAL AND TEMPORAL CONTROL OF TEMPERATURE ON A SUBS...
- Publication number 20120018411
- Publication date Jan 26, 2012
- LAM RESEARCH CORPORATION
- Anthony J. Ricci
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
PLASMA PROCESSING SYSTEMS WITH MECHANISMS FOR CONTROLLING TEMPERATU...
- Publication number 20090301657
- Publication date Dec 10, 2009
- James Tappan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRODE ORIENTATION AND PARALLELISM ADJUSTMENT MECHANISM FOR PLAS...
- Publication number 20090199766
- Publication date Aug 13, 2009
- James E. Tappan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ADJUSTABLE GAP CAPACITIVELY COUPLED RF PLASMA REACTOR INCLUDING LAT...
- Publication number 20090200268
- Publication date Aug 13, 2009
- LAM RESEARCH CORPORATION
- James E. Tappan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FLOATING COLLAR CLAMPING DEVICE FOR AUTO-ALIGNING NUT AND SCREW IN...
- Publication number 20090199665
- Publication date Aug 13, 2009
- James E. Tappan
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
Method of manufacturing apparatus for spatial and temporal control...
- Publication number 20090078360
- Publication date Mar 26, 2009
- LAM RESEARCH CORPORATION
- Anthony J. Ricci
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Method of protecting a bond layer in a substrate support adapted fo...
- Publication number 20080314508
- Publication date Dec 25, 2008
- LAM RESEARCH CORPORATION
- Tony Ricci
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of protecting a bond layer in a substrate support adapted fo...
- Publication number 20070131350
- Publication date Jun 14, 2007
- Anthony Ricci
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Apparatus for spatial and temporal control of temperature on a subs...
- Publication number 20060144516
- Publication date Jul 6, 2006
- Lam Research Inc., a Delaware Corporation
- Anthony J. Ricci
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Corrosion resistant apparatus for control of a multi-zone nozzle in...
- Publication number 20060065523
- Publication date Mar 30, 2006
- Fangli Hao
- H01 - BASIC ELECTRIC ELEMENTS

James Tappan

Person

Patents Grantslast 30 patents

Plasma processing devices having multi-port valve assemblies

Apparatus for spatial and temporal control of temperature on a subs...

Chamber with vertical support stem for symmetric conductance and RF...

Apparatus for spatial and temporal control of temperature on a subs...

Chamber with vertical support stem for symmetric conductance and RF...

Chamber with vertical support stem for symmetric conductance and RF...

Plasma processing devices having multi-port valve assemblies

Floating collar clamping device for auto-aligning nut and screw in...

Plasma processing systems with mechanisms for controlling temperatu...

Apparatus for spatial and temporal control of temperature on a subs...

Method for spatial and temporal control of temperature on a substrate

Adjustable gap capacitively coupled RF plasma reactor including lat...

Adjustable gap capacitively coupled RF plasma reactor including lat...

Floating collar clamping device for auto-aligning nut and screw in...

Electrode orientation and parallelism adjustment mechanism for plas...

Electrode orientation and parallelism adjustment mechanism for plas...

Method of manufacturing apparatus for spatial and temporal control...

Apparatus for spatial and temporal control of temperature on a subs...

Method of protecting a bond layer in a substrate support adapted fo...

Method of protecting a bond layer in a substrate support adapted fo...

Reaction chamber design to minimize particle generation in chemical...

Reaction chamber design and method to minimize particle generation...

Patents Applicationslast 30 patents

SEMICONDUCTOR PROCESSING CHAMBER WITH DUAL-LIFT MECHANISM FOR EDGE...

AUTOMATED PROCESS MODULE RING POSITIONING AND REPLACEMENT

APPARATUS FOR SPATIAL AND TEMPORAL CONTROL OF TEMPERATURE ON A SUBS...

CHAMBER WITH VERTICAL SUPPORT STEM FOR SYMMETRIC CONDUCTANCE AND RF...

CHAMBER WITH VERTICAL SUPPORT STEM FOR SYMMETRIC CONDUCTANCE AND RF...

PLASMA PROCESSING DEVICES HAVING MULTI-PORT VALVE ASSEMBLIES

CHAMBER WITH VERTICAL SUPPORT STEM FOR SYMMETRIC CONDUCTANCE AND RF...

PLASMA PROCESSING DEVICES HAVING MULTI-PORT VALVE ASSEMBLIES

APPARATUS FOR SPATIAL AND TEMPORAL CONTROL OF TEMPERATURE ON A SUBS...

ADJUSTABLE GAP CAPACITIVELY COUPLED RF PLASMA REACTOR INCLUDING LAT...

FLOATING COLLAR CLAMPING DEVICE FOR AUTO-ALIGNING NUT AND SCREW IN...

APPARATUS FOR SPATIAL AND TEMPORAL CONTROL OF TEMPERATURE ON A SUBS...

ELECTRODE ORIENTATION AND PARALLELISM ADJUSTMENT MECHANISM FOR PLAS...

APPARATUS FOR SPATIAL AND TEMPORAL CONTROL OF TEMPERATURE ON A SUBS...

PLASMA PROCESSING SYSTEMS WITH MECHANISMS FOR CONTROLLING TEMPERATU...

ELECTRODE ORIENTATION AND PARALLELISM ADJUSTMENT MECHANISM FOR PLAS...

ADJUSTABLE GAP CAPACITIVELY COUPLED RF PLASMA REACTOR INCLUDING LAT...

FLOATING COLLAR CLAMPING DEVICE FOR AUTO-ALIGNING NUT AND SCREW IN...

Method of manufacturing apparatus for spatial and temporal control...

Method of protecting a bond layer in a substrate support adapted fo...

Method of protecting a bond layer in a substrate support adapted fo...

Apparatus for spatial and temporal control of temperature on a subs...

Corrosion resistant apparatus for control of a multi-zone nozzle in...