James Vanell

Person

Tempe, AZ, US

People

Patents Grantslast 30 patents

Information Patent Grant
Pad conditioner coupling and end effector for a chemical mechanical...
- Patent number 6,796,885
- Issue date Sep 28, 2004
- FREESCALE SEMICONDUCTOR, INC.
- James F. Vanell
- B24 - GRINDING POLISHING
Information Patent Grant
Filter apparatus and method therefor
- Patent number 6,592,708
- Issue date Jul 15, 2003
- Motorola, Inc.
- James F. Vanell
- B24 - GRINDING POLISHING
Information Patent Grant
Wafer carrier and method of material removal from a semiconductor w...
- Patent number 6,592,434
- Issue date Jul 15, 2003
- Motorola, Inc.
- James F. Vanell
- B24 - GRINDING POLISHING
Information Patent Grant
Carrier assembly for chemical mechanical planarization systems and...
- Patent number 6,572,462
- Issue date Jun 3, 2003
- Motorola, Inc.
- James F. Vanell
- B24 - GRINDING POLISHING
Information Patent Grant
Pad conditioner coupling and end effector for a chemical mechanical...
- Patent number 6,514,126
- Issue date Feb 4, 2003
- Motorola, Inc.
- James F. Vanell
- B24 - GRINDING POLISHING
Information Patent Grant
Translation mechanism for a chemical mechanical planarization syste...
- Patent number 6,482,073
- Issue date Nov 19, 2002
- Motorola, Inc.
- James F. Vanell
- B24 - GRINDING POLISHING
Information Patent Grant
Filter apparatus and method therefor
- Patent number 6,423,638
- Issue date Jul 23, 2002
- Motorola, Inc.
- James F. Vanell
- B24 - GRINDING POLISHING
Information Patent Grant
Point of use dilution tool and method
- Patent number 6,406,555
- Issue date Jun 18, 2002
- Motorola Inc.
- James A. Grootegoed
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Method of manufacturing a semiconductor component and chemical-mech...
- Patent number 6,267,641
- Issue date Jul 31, 2001
- Motorola, Inc.
- James F. Vanell
- B24 - GRINDING POLISHING
Information Patent Grant
Pad conditioner coupling and end effector for a chemical mechanical...
- Patent number 6,263,605
- Issue date Jul 24, 2001
- Motorola, Inc.
- James F. Vanell
- B24 - GRINDING POLISHING
Information Patent Grant
Chemical mechanical planarization system
- Patent number 6,149,508
- Issue date Nov 21, 2000
- Motorola, Inc.
- James F. Vanell
- B24 - GRINDING POLISHING
Information Patent Grant
Translation mechanism for a chemical mechanical planarization syste...
- Patent number 6,135,855
- Issue date Oct 24, 2000
- Motorola, Inc.
- James F. Vanell
- B24 - GRINDING POLISHING
Information Patent Grant
Chemical mechanical polishing system and method therefor
- Patent number 6,107,203
- Issue date Aug 22, 2000
- Motorola, Inc.
- James F. Vanell
- B24 - GRINDING POLISHING
Information Patent Grant
Point of use dilution tool and method
- Patent number 6,070,600
- Issue date Jun 6, 2000
- Motorola, Inc.
- James A. Grootegoed
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Chemical mechanical planarization system and method therefor
- Patent number 5,945,346
- Issue date Aug 31, 1999
- Motorola, Inc.
- James F. Vanell
- B24 - GRINDING POLISHING
Information Patent Grant
Gas diffuser plate assembly and RF electrode
- Patent number 5,908,508
- Issue date Jun 1, 1999
- Tokyo Electron Limited
- James Vanell
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for dynamically mixing slurry for chemical mec...
- Patent number 5,750,440
- Issue date May 12, 1998
- Motorola, Inc.
- James F. Vanell
- B24 - GRINDING POLISHING
Information Patent Grant
Platen coating structure for chemical mechanical polishing and method
- Patent number 5,743,788
- Issue date Apr 28, 1998
- Motorola, Inc.
- James F. Vanell
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas diffuser plate assembly and RF electrode
- Patent number 5,647,911
- Issue date Jul 15, 1997
- Sony Corporation
- James Vanell
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Pad conditioner coupling and end effector for a chemical mechanical...
- Publication number 20030068963
- Publication date Apr 10, 2003
- James F. Vanell
- B24 - GRINDING POLISHING
Information Patent Application
Filter apparatus and method therefor
- Publication number 20020127860
- Publication date Sep 12, 2002
- James F. Vanell
- B24 - GRINDING POLISHING

James Vanell

Person

Patents Grantslast 30 patents

Pad conditioner coupling and end effector for a chemical mechanical...

Filter apparatus and method therefor

Wafer carrier and method of material removal from a semiconductor w...

Carrier assembly for chemical mechanical planarization systems and...

Pad conditioner coupling and end effector for a chemical mechanical...

Translation mechanism for a chemical mechanical planarization syste...

Filter apparatus and method therefor

Point of use dilution tool and method

Method of manufacturing a semiconductor component and chemical-mech...

Pad conditioner coupling and end effector for a chemical mechanical...

Chemical mechanical planarization system

Translation mechanism for a chemical mechanical planarization syste...

Chemical mechanical polishing system and method therefor

Point of use dilution tool and method

Chemical mechanical planarization system and method therefor

Gas diffuser plate assembly and RF electrode

Apparatus and method for dynamically mixing slurry for chemical mec...

Platen coating structure for chemical mechanical polishing and method

Gas diffuser plate assembly and RF electrode

Patents Applicationslast 30 patents

Pad conditioner coupling and end effector for a chemical mechanical...

Filter apparatus and method therefor