James W. Caughran

Person

Lodi, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for plasma optimization in water processing
- Patent number 7,017,514
- Issue date Mar 28, 2006
- Novellus Systems, Inc.
- Robert A. Shepherd, Jr.
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Energy transfer microwave plasma source
- Patent number 6,211,621
- Issue date Apr 3, 2001
- Gasonics International
- James W. Caughran
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Resonant impedance-matching slow-wave ring structure microwave appl...
- Patent number 6,175,095
- Issue date Jan 16, 2001
- Gasonics International
- Niles K. MacDonald
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Modular process system
- Patent number 5,863,170
- Issue date Jan 26, 1999
- Gasonics International
- Charles A. Boitnott
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor wafer processing carousel
- Patent number 5,855,465
- Issue date Jan 5, 1999
- Gasonics International
- Charles A. Boitnott
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Process chamber sleeve with ring seals for isolating individual pro...
- Patent number 5,667,592
- Issue date Sep 16, 1997
- Gasonics International
- Charles A. Boitnott
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Modular gas box system
- Patent number 5,662,143
- Issue date Sep 2, 1997
- Gasonics International
- James W. Caughran
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

James W. Caughran

Person

Patents Grantslast 30 patents

Method and apparatus for plasma optimization in water processing

Energy transfer microwave plasma source

Resonant impedance-matching slow-wave ring structure microwave appl...

Modular process system

Semiconductor wafer processing carousel

Process chamber sleeve with ring seals for isolating individual pro...

Modular gas box system