James W. Demmel

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Berkeley, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Integrated MEMS metrology device using complementary measuring combs
- Patent number 8,079,246
- Issue date Dec 20, 2011
- The Regents of the University of California
- David Garmire
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for fabricating vertically-offset interdigitated comb actuat...
- Patent number 7,573,022
- Issue date Aug 11, 2009
- The Regents of the University of California
- Hyuck Choo
- G02 - OPTICS
Information Patent Grant
MEMS-based, phase-shifting interferometer
- Patent number 7,564,559
- Issue date Jul 21, 2009
- The Regents of the University of California
- Hyuck Choo
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
INTEGRATED MEMS METROLOGY DEVICE USING COMPLEMENTARY MEASURING COMBS
- Publication number 20090322365
- Publication date Dec 31, 2009
- Regents of the University of California
- David Garmire
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS-based, phase-shifting interferometer
- Publication number 20070279638
- Publication date Dec 6, 2007
- The Regents of the University of California
- Hyuck Choo
- G01 - MEASURING TESTING
Information Patent Application
CMOS-compatible high-performance microscanners, including structure...
- Publication number 20070026614
- Publication date Feb 1, 2007
- The Regents of the University of California.
- Hyuck Choo
- G02 - OPTICS