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Jan Andries Meijer
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Rotterdam, NL
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Patents Grants
last 30 patents
Information
Patent Grant
Charged particle lithography system with alignment sensor and beam...
Patent number
RE49732
Issue date
Nov 21, 2023
ASML Netherlands B.V.
Paul IJmert Scheffers
Information
Patent Grant
Charged particle lithography system with alignment sensor and beam...
Patent number
9,665,014
Issue date
May 30, 2017
Mapper Lithography IP B.V.
Paul Ijmert Scheffers
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Device for spot size measurement at wafer level using a knife edge...
Patent number
9,240,306
Issue date
Jan 19, 2016
Mapper Lithography IP B.V.
Jan Andries Meijer
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Method for determining a distance between two beamlets in a multi-b...
Patent number
9,030,675
Issue date
May 12, 2015
Mapper Lithography IP B.V.
Jan Andries Meijer
B82 - NANO-TECHNOLOGY
Patents Applications
last 30 patents
Information
Patent Application
CHARGED PARTICLE LITHOGRAPHY SYSTEM WITH SENSOR ASSEMBLY
Publication number
20150179398
Publication date
Jun 25, 2015
MAPPER LITHOGRAPHY IP BV
Paul IJmert Scheffers
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE LITHOGRAPHY SYSTEM WITH ALIGNMENT SENSOR AND BEAM...
Publication number
20150109601
Publication date
Apr 23, 2015
MAPPER LITHOGRAPHY IP BV
Paul IJmert Scheffers
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
DEVICE FOR SPOT SIZE MEASUREMENT AT WAFER LEVEL USING A KNIFE EDGE...
Publication number
20150001423
Publication date
Jan 1, 2015
MAPPER LITHOGRAPHY IP BV
Jan Andries Meijer
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR DETERMINING A DISTANCE BETWEEN TWO BEAMLETS IN A MULTI-B...
Publication number
20120293810
Publication date
Nov 22, 2012
MAPPER LITHOGRAPHY IP BV
Jan Andries MEIJER
B82 - NANO-TECHNOLOGY