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Jan Bex
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Overpelt, BE
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Patents Grants
last 30 patents
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Patent Grant
MEMS device and assembly method
Patent number
7,628,875
Issue date
Dec 8, 2009
ASML Netherlands B.V.
Jan Bex
B81 - MICRO-STRUCTURAL TECHNOLOGY
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last 30 patents
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Patent Application
MEMS device and assembly method
Publication number
20080063830
Publication date
Mar 13, 2008
ASML NETHERLANDS B.V.
Jan Bex
B81 - MICRO-STRUCTURAL TECHNOLOGY