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Jan Hendrik Den Besten
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Eindhoven, NL
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Patents Grants
last 30 patents
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Patent Grant
Method of determining dose and focus, inspection apparatus, pattern...
Patent number
9,964,853
Issue date
May 8, 2018
ASML Netherlands B.V.
Peter Clement Paul Vanoppen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
Method of Determining Dose and Focus, Inspection Apparatus, Pattern...
Publication number
20150293458
Publication date
Oct 15, 2015
ASML NETHERLANDS B.V.
Peter Clement Paul Vanoppen
G01 - MEASURING TESTING