Jan Hermans

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Lummen, BE

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Patents Grantslast 30 patents

Information Patent Grant
Systems and methods for UV lithography
- Patent number 8,006,202
- Issue date Aug 23, 2011
- IMEC
- Gian Francesco Lorusso
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Method and system for measuring contamination of a lithographical e...
- Patent number 7,750,319
- Issue date Jul 6, 2010
- IMEC
- Gian Francesco Lorusso
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
METHOD AND SYSTEM FOR MEASURING CONTAMINATION OF A LITHOGRAPHICAL E...
- Publication number 20080315125
- Publication date Dec 25, 2008
- Interuniversitair Microelektronica Centrum (IMEC) VZW
- Gian Francesco Lorusso
- G01 - MEASURING TESTING
Information Patent Application
SYSTEMS AND METHODS FOR UV LITHOGRAPHY
- Publication number 20080229273
- Publication date Sep 18, 2008
- Interuniversitair Microelektronica Centrum (IMEC) VZW
- Gian Francesco Lorusso
- B82 - NANO-TECHNOLOGY