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Jan Hoegee
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Delft, NL
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Patents Grants
last 30 patents
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Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
6,958,806
Issue date
Oct 25, 2005
ASML Netherlands B.V.
Heine Melle Mulder
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Optical integrator for an illumination device
Patent number
6,733,165
Issue date
May 11, 2004
Carl Zeiss Semiconductor Manufacturing Technologies AG
Sijbe Abraham Van Der Lei
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Lithographic apparatus, device manufacturing method, and device man...
Patent number
6,583,855
Issue date
Jun 24, 2003
ASML Netherlands B.V.
Jan Jaap Krikke
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
Lithographic apparatus and device manufacturing method
Publication number
20040114123
Publication date
Jun 17, 2004
ASML NETHERLANDS B.V.
Heine Melle Mulder
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Optical integrator for an illumination device
Publication number
20020126931
Publication date
Sep 12, 2002
CARL ZEISS SEMICONDUCTOR MANUFACTURING TECHNOLOGIES AG
Sijbe Abraham Van Der Lei
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Application
Lithographic apparatus, device manufacturing method, and device man...
Publication number
20020036763
Publication date
Mar 28, 2002
Jan Jaap Krikke
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY