Jan Horn

Person

Muenchen, DE

People

Patents Grantslast 30 patents

Information Patent Grant
System, method and marker for the determination of the position of...
- Patent number 11,504,855
- Issue date Nov 22, 2022
- Carl Zeiss SMT GmbH
- Jan Horn
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Optical arrangement and lithography apparatus
- Patent number 11,402,760
- Issue date Aug 2, 2022
- Carl Zeiss SMT GmbH
- Jan Horn
- G02 - OPTICS
Information Patent Grant
Image sensor, position sensor device, lithography system, and metho...
- Patent number 11,262,660
- Issue date Mar 1, 2022
- Carl Zeiss SMT GmbH
- Jan Horn
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Multi-beam particle beam system
- Patent number 11,239,054
- Issue date Feb 1, 2022
- Carl Zeiss MultiSEM GmbH
- Yanko Sarov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-beam particle beam system
- Patent number 10,854,423
- Issue date Dec 1, 2020
- Carl Zeiss MultiSEM GmbH
- Yanko Sarov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Control device
- Patent number 10,678,151
- Issue date Jun 9, 2020
- Carl Zeiss SMT GmbH
- Markus Holz
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Sensor arrangement for a lithography system, lithography system, an...
- Patent number 10,514,619
- Issue date Dec 24, 2019
- Carl Zeiss SMT GmbH
- Ulrich Bihr
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Device for transmitting electrical signals, and lithography apparatus
- Patent number 10,459,351
- Issue date Oct 29, 2019
- Carl Zeiss SMT GmbH
- Jan Horn
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Sensor assembly and method for determining respective positions of...
- Patent number 10,444,633
- Issue date Oct 15, 2019
- Carl Zeiss SMT GmbH
- Jan Horn
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Sensor assembly and method for determining respective positions of...
- Patent number 10,437,155
- Issue date Oct 8, 2019
- Carl Zeiss SMT GmbH
- Jan Horn
- G01 - MEASURING TESTING
Information Patent Grant
Multi-mirror array
- Patent number 10,139,618
- Issue date Nov 27, 2018
- Carl Zeiss SMT GmbH
- Jan Horn
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Methods and devices for driving micromirrors
- Patent number 10,061,202
- Issue date Aug 28, 2018
- Carl Zeiss SMT GmbH
- Jan Horn
- G02 - OPTICS
Information Patent Grant
Device and method for controlling positioning of multiple adjustabl...
- Patent number 10,018,803
- Issue date Jul 10, 2018
- Carl Zeiss SMT GmbH
- Jan Horn
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Device for determining a tilt angle of at least one mirror of a lit...
- Patent number 10,007,195
- Issue date Jun 26, 2018
- Carl Zeiss SMT GmbH
- Jan Horn
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and device for monitoring multiple mirror arrays in an illum...
- Patent number 9,897,925
- Issue date Feb 20, 2018
- Carl Zeiss SMT GmbH
- Stefan Xalter
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical component
- Patent number 9,851,555
- Issue date Dec 26, 2017
- Carl Zeiss SMT GmbH
- Markus Holz
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Optical module
- Patent number 9,599,788
- Issue date Mar 21, 2017
- Carl Zeiss SMT GmbH
- Jan Horn
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illumination system for a microlithographic projection exposure app...
- Patent number 9,348,232
- Issue date May 24, 2016
- Carl Zeiss SMT GmbH
- Jan Horn
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and device for monitoring multiple mirror arrays in an illum...
- Patent number 9,239,229
- Issue date Jan 19, 2016
- Carl Zeiss SMT GmbH
- Stefan Xalter
- G01 - MEASURING TESTING
Information Patent Grant
Method and device for monitoring multiple mirror arrays in an illum...
- Patent number 9,019,475
- Issue date Apr 28, 2015
- Carl Zeiss SMT GmbH
- Stefan Xalter
- G01 - MEASURING TESTING
Information Patent Grant
Method and device for monitoring multiple mirror arrays in an illum...
- Patent number 9,013,684
- Issue date Apr 21, 2015
- Carl Zeiss SMT GmbH
- Stefan Xalter
- G01 - MEASURING TESTING
Information Patent Grant
Method and device for monitoring multiple mirror arrays in an illum...
- Patent number 9,001,309
- Issue date Apr 7, 2015
- Carl Zeiss SMT GmbH
- Stefan Xalter
- G01 - MEASURING TESTING
Information Patent Grant
Methods and devices for driving micromirrors
- Patent number 8,345,224
- Issue date Jan 1, 2013
- Carl Zeiss SMT GmbH
- Jan Horn
- G02 - OPTICS
Information Patent Grant
Method and device for monitoring multiple mirror arrays in an illum...
- Patent number 8,339,577
- Issue date Dec 25, 2012
- Carl Zeiss SMT GmbH
- Stefan Xalter
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
MIRROR, IN PARTICULAR FOR MICROLITHOGRAPHY
- Publication number 20230088791
- Publication date Mar 23, 2023
- Carl Zeiss SMT GMBH
- Jan HORN
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
OPTICAL ARRANGEMENT AND LITHOGRAPHY APPARATUS
- Publication number 20220004107
- Publication date Jan 6, 2022
- Carl Zeiss SMT GMBH
- Jan Horn
- G01 - MEASURING TESTING
Information Patent Application
MULTI-BEAM PARTICLE BEAM SYSTEM
- Publication number 20210066037
- Publication date Mar 4, 2021
- Carl Zeiss MultiSEM GmbH
- Yanko Sarov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
IMAGE SENSOR, POSITION SENSOR DEVICE, LITHOGRAPHY SYSTEM, AND METHO...
- Publication number 20200363731
- Publication date Nov 19, 2020
- Carl Zeiss SMT GMBH
- Jan Horn
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SYSTEM, METHOD AND MARKER FOR THE DETERMINATION OF THE POSITION OF...
- Publication number 20200114519
- Publication date Apr 16, 2020
- Carl Zeiss SMT GMBH
- Jan Horn
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
MULTI-BEAM PARTICLE BEAM SYSTEM
- Publication number 20190259575
- Publication date Aug 22, 2019
- CARL ZEISS MICROSCOPY GMBH
- Yanko Sarov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVICE FOR TRANSMITTING ELECTRICAL SIGNALS, AND LITHOGRAPHY APPARATUS
- Publication number 20190196343
- Publication date Jun 27, 2019
- Carl Zeiss SMT GMBH
- Jan Horn
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
CONTROL DEVICE
- Publication number 20190187574
- Publication date Jun 20, 2019
- Carl Zeiss SMT GMBH
- Markus Holz
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD AND DEVICE FOR MONITORING MULTIPLE MIRROR ARRAYS IN AN ILLUM...
- Publication number 20180246415
- Publication date Aug 30, 2018
- Carl Zeiss SMT GMBH
- Stefan Xalter
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Application
SENSOR ARRANGEMENT FOR A LITHOGRAPHY SYSTEM, LITHOGRAPHY SYSTEM, AN...
- Publication number 20180188656
- Publication date Jul 5, 2018
- Ulrich Bihr
- G02 - OPTICS
Information Patent Application
SENSOR ASSEMBLY AND METHOD FOR DETERMINING RESPECTIVE POSITIONS OF...
- Publication number 20180067400
- Publication date Mar 8, 2018
- Carl Zeiss SMT GMBH
- Jan Horn
- G01 - MEASURING TESTING
Information Patent Application
SENSOR ASSEMBLY AND METHOD FOR DETERMINING RESPECTIVE POSITIONS OF...
- Publication number 20180067399
- Publication date Mar 8, 2018
- Carl Zeiss SMT GMBH
- Jan Horn
- G01 - MEASURING TESTING
Information Patent Application
MULTI-MIRROR ARRAY
- Publication number 20180003951
- Publication date Jan 4, 2018
- Carl Zeiss SMT GMBH
- Jan Horn
- G02 - OPTICS
Information Patent Application
DEVICE AND METHOD FOR CONTROLLING POSITIONING OF MULTIPLE ADJUSTABL...
- Publication number 20170038555
- Publication date Feb 9, 2017
- Carl Zeiss SMT GMBH
- Jan Horn
- G02 - OPTICS
Information Patent Application
METHOD AND DEVICE FOR MONITORING MULTIPLE MIRROR ARRAYS IN AN ILLUM...
- Publication number 20160266502
- Publication date Sep 15, 2016
- Carl Zeiss SMT GMBH
- Stefan Xalter
- G01 - MEASURING TESTING
Information Patent Application
DEVICE FOR DETERMINING A TILT ANGLE OF AT LEAST ONE MIRROR OF A LIT...
- Publication number 20160246186
- Publication date Aug 25, 2016
- Carl Zeiss SMT GMBH
- Jan Horn
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
OPTICAL COMPONENT
- Publication number 20160170201
- Publication date Jun 16, 2016
- Carl Zeiss SMT GMBH
- Markus Holz
- G02 - OPTICS
Information Patent Application
Optical Module
- Publication number 20160025952
- Publication date Jan 28, 2016
- Carl Zeiss SMT GMBH
- Jan Horn
- G02 - OPTICS
Information Patent Application
METHOD AND DEVICE FOR MONITORING MULTIPLE MIRROR ARRAYS IN AN ILLUM...
- Publication number 20150300807
- Publication date Oct 22, 2015
- Carl Zeiss SMT GMBH
- Stefan Xalter
- G01 - MEASURING TESTING
Information Patent Application
METHOD FOR REGULATING THE TILTING OF A MIRROR ELEMENT
- Publication number 20150185469
- Publication date Jul 2, 2015
- Carl Zeiss SMT GMBH
- Jan Horn
- G02 - OPTICS
Information Patent Application
METHOD AND DEVICE FOR MONITORING MULTIPLE MIRROR ARRAYS IN AN ILLUM...
- Publication number 20140233006
- Publication date Aug 21, 2014
- Stefan Xalter
- G02 - OPTICS
Information Patent Application
METHOD AND DEVICE FOR MONITORING MULTIPLE MIRROR ARRAYS IN AN ILLUM...
- Publication number 20140226141
- Publication date Aug 14, 2014
- Carl Zeiss SMT GMBH
- Stefan Xalter
- G02 - OPTICS
Information Patent Application
METHODS AND DEVICES FOR DRIVING MICROMIRRORS
- Publication number 20130088698
- Publication date Apr 11, 2013
- Carl Zeiss SMT GMBH
- Jan Horn
- G02 - OPTICS
Information Patent Application
METHOD AND DEVICE FOR MONITORING MULTIPLE MIRROR ARRAYS IN AN ILLUM...
- Publication number 20120293784
- Publication date Nov 22, 2012
- Carl Zeiss SMT GMBH
- Stefan Xalter
- G02 - OPTICS
Information Patent Application
METHODS AND DEVICES FOR DRIVING MICROMIRRORS
- Publication number 20110188017
- Publication date Aug 4, 2011
- Carl Zeiss SMT GMBH
- Jan Horn
- G02 - OPTICS
Information Patent Application
ILLUMINATION SYSTEM FOR A MICROLITHOGRAPHIC PROJECTION EXPOSURE APP...
- Publication number 20100309449
- Publication date Dec 9, 2010
- Carl Zeiss SMT AG
- Jan Horn
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD AND DEVICE FOR MONITORING MULTIPLE MIRROR ARRAYS IN AN ILLUM...
- Publication number 20100039629
- Publication date Feb 18, 2010
- Carl Zeiss SMT AG
- Stefan Xalter
- G02 - OPTICS

Person

Patents Grantslast 30 patents

System, method and marker for the determination of the position of...

Optical arrangement and lithography apparatus

Image sensor, position sensor device, lithography system, and metho...

Multi-beam particle beam system

Multi-beam particle beam system

Control device

Sensor arrangement for a lithography system, lithography system, an...

Device for transmitting electrical signals, and lithography apparatus

Sensor assembly and method for determining respective positions of...

Sensor assembly and method for determining respective positions of...

Multi-mirror array

Methods and devices for driving micromirrors

Device and method for controlling positioning of multiple adjustabl...

Device for determining a tilt angle of at least one mirror of a lit...

Method and device for monitoring multiple mirror arrays in an illum...

Optical component

Optical module

Illumination system for a microlithographic projection exposure app...

Method and device for monitoring multiple mirror arrays in an illum...

Method and device for monitoring multiple mirror arrays in an illum...

Method and device for monitoring multiple mirror arrays in an illum...

Method and device for monitoring multiple mirror arrays in an illum...

Methods and devices for driving micromirrors

Method and device for monitoring multiple mirror arrays in an illum...

Patents Applicationslast 30 patents

MIRROR, IN PARTICULAR FOR MICROLITHOGRAPHY

OPTICAL ARRANGEMENT AND LITHOGRAPHY APPARATUS

MULTI-BEAM PARTICLE BEAM SYSTEM

IMAGE SENSOR, POSITION SENSOR DEVICE, LITHOGRAPHY SYSTEM, AND METHO...

SYSTEM, METHOD AND MARKER FOR THE DETERMINATION OF THE POSITION OF...

MULTI-BEAM PARTICLE BEAM SYSTEM

DEVICE FOR TRANSMITTING ELECTRICAL SIGNALS, AND LITHOGRAPHY APPARATUS

CONTROL DEVICE

METHOD AND DEVICE FOR MONITORING MULTIPLE MIRROR ARRAYS IN AN ILLUM...

SENSOR ARRANGEMENT FOR A LITHOGRAPHY SYSTEM, LITHOGRAPHY SYSTEM, AN...

SENSOR ASSEMBLY AND METHOD FOR DETERMINING RESPECTIVE POSITIONS OF...

SENSOR ASSEMBLY AND METHOD FOR DETERMINING RESPECTIVE POSITIONS OF...

MULTI-MIRROR ARRAY

DEVICE AND METHOD FOR CONTROLLING POSITIONING OF MULTIPLE ADJUSTABL...

METHOD AND DEVICE FOR MONITORING MULTIPLE MIRROR ARRAYS IN AN ILLUM...

DEVICE FOR DETERMINING A TILT ANGLE OF AT LEAST ONE MIRROR OF A LIT...

OPTICAL COMPONENT

Optical Module

METHOD AND DEVICE FOR MONITORING MULTIPLE MIRROR ARRAYS IN AN ILLUM...

METHOD FOR REGULATING THE TILTING OF A MIRROR ELEMENT

METHOD AND DEVICE FOR MONITORING MULTIPLE MIRROR ARRAYS IN AN ILLUM...

METHOD AND DEVICE FOR MONITORING MULTIPLE MIRROR ARRAYS IN AN ILLUM...

METHODS AND DEVICES FOR DRIVING MICROMIRRORS

METHOD AND DEVICE FOR MONITORING MULTIPLE MIRROR ARRAYS IN AN ILLUM...

METHODS AND DEVICES FOR DRIVING MICROMIRRORS

ILLUMINATION SYSTEM FOR A MICROLITHOGRAPHIC PROJECTION EXPOSURE APP...

METHOD AND DEVICE FOR MONITORING MULTIPLE MIRROR ARRAYS IN AN ILLUM...