Membership
Tour
Register
Log in
Jan M. Chabala
Follow
Person
San Ramon, CA, US
People
Overview
Industries
Organizations
People
Information
Impact
Patents Grants
last 30 patents
Information
Patent Grant
Lithography using multiple pass raster-shaped beam
Patent number
6,433,348
Issue date
Aug 13, 2002
Applied Materials, Inc.
Fayez E. Abboud
B82 - NANO-TECHNOLOGY