TREA

Jan Matusche

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  • Dresden, DE
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Patents Grantslast 30 patents

  • Information Patent Grant

    Hafnium oxide ALD process
    • Patent number 8,016,945
    • Issue date Sep 13, 2011
    • Applied Materials, Inc.
    • Thomas Zilbauer
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

  • Information Patent Application

    HAFNIUM OXIDE ALD PROCESS
    • Publication number 20090162551
    • Publication date Jun 25, 2009
    • Thomas Zilbauer
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...