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Jan Van Eijk
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Eindhoven, NL
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last 30 patents
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Patent Application
LITHOGRAPHIC APPARATUS, METHOD OF DEFORMING A SUBSTRATE TABLE AND D...
Publication number
20120327386
Publication date
Dec 27, 2012
ASML NETHERLANDS B.V.
Yang-Shan Huang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Application
Lithographic apparatus
Publication number
20050157285
Publication date
Jul 21, 2005
ASML NETHERLANDS B.V.
Gerard Van Schothorst
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus and motor for use in the apparatus
Publication number
20040207269
Publication date
Oct 21, 2004
ASML NETHERLANDS B.V.
Sven Antoin Johan Hol
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY