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Eindhoven, NL
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Patents Grants
last 30 patents
Information
Patent Grant
Control system, positioning system, lithographic apparatus, control...
Patent number
10,095,123
Issue date
Oct 9, 2018
ASML Netherlands B.V.
Marinus Maria Johannes Van De Wal
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Sensor, object positioning system, lithographic apparatus and devic...
Patent number
10,061,213
Issue date
Aug 28, 2018
ASML Netherlands B.V.
Johannes Antonius Gerardus Akkermans
G01 - MEASURING TESTING
Information
Patent Grant
Sensor, object positioning system, lithographic apparatus and devic...
Patent number
10,012,914
Issue date
Jul 3, 2018
ASML Netherlands B.V.
Johannes Antonius Gerardus Akkermans
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Stage positioning system and lithographic apparatus
Patent number
9,897,926
Issue date
Feb 20, 2018
ASML Netherlands B.V.
Wilhelmus Henricus Theodorus Maria Aangenent
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus, method of deforming a substrate table and d...
Patent number
9,329,501
Issue date
May 3, 2016
ASML Netherlands B.V.
Yang-Shan Huang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus, and patterning device for use in a lithogra...
Patent number
9,268,211
Issue date
Feb 23, 2016
ASML Netherlands B.V.
Jan Van Eijk
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Suction unit and autonomous vacuum cleaner
Patent number
9,192,271
Issue date
Nov 24, 2015
Koninklijke Philips N.V.
Jeroen Dekkers
A47 - FURNITURE DOMESTIC ARTICLES OR APPLIANCES COFFEE MILLS SPICE MILLS SUCT...
Information
Patent Grant
Lithographic apparatus comprising a substrate table and a surface s...
Patent number
9,110,387
Issue date
Aug 18, 2015
ASML Netherlands B.V.
Hans Butler
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus, and patterning device for use in a lithogra...
Patent number
9,019,470
Issue date
Apr 28, 2015
ASML Netherlands B.V.
Jan Van Eijk
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
System for detecting motion, lithographic apparatus and device manu...
Patent number
8,982,359
Issue date
Mar 17, 2015
ASML Netherlands B.V.
Jan Van Eijk
G01 - MEASURING TESTING
Information
Patent Grant
Positioning system and a method for positioning a substage with res...
Patent number
8,896,811
Issue date
Nov 25, 2014
ASML Netherlands B.V.
Sven Antoin Johan Hol
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Electromagnetic actuator, stage apparatus and lithographic apparatus
Patent number
8,687,171
Issue date
Apr 1, 2014
ASML Netherlands B.V.
Sven Antoin Johan Hol
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Positioning system, lithographic apparatus and method
Patent number
8,482,719
Issue date
Jul 9, 2013
ASML Netherlands B.V.
Jan Van Eijk
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
8,441,616
Issue date
May 14, 2013
ASML Netherlands B.V.
Jan Van Eijk
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus with gas pressure means for controlling a pl...
Patent number
8,368,868
Issue date
Feb 5, 2013
ASML Netherlands B.V.
Johannes Petrus Martinus Bernardus Vermeulen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Masking device, lithographic apparatus, and device manufacturing me...
Patent number
8,059,261
Issue date
Nov 15, 2011
ASML Netherlands B.V.
Antoine Hendrik Verweij
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Displacement device
Patent number
7,948,122
Issue date
May 24, 2011
Koninklijke Philips Electronics N.V.
Johan Cornelis Compter
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
System for detecting motion of a body
Patent number
7,902,494
Issue date
Mar 8, 2011
Koninklijke Philips Electronics N.V.
Ronatus Gerardus Klaver
G01 - MEASURING TESTING
Information
Patent Grant
Lithographic apparatus
Patent number
7,612,867
Issue date
Nov 3, 2009
ASML Netherlands B.V.
Gerard Van Schothorst
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Positioning device with a vibration-free object table, and lithogra...
Patent number
RE40774
Issue date
Jun 23, 2009
ASML Netherlands B.V.
Gerard van Engelen
355 - Photocopying
Information
Patent Grant
Lithographic apparatus
Patent number
7,423,730
Issue date
Sep 9, 2008
ASML Netherlands B.V.
Gerard Van Schothorst
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Apparatus for processing an object with high position accurancy
Patent number
7,375,479
Issue date
May 20, 2008
Koninklijke Philips Electronics, N.V.
Jan Van Eijk
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
7,248,339
Issue date
Jul 24, 2007
ASML Netherlands B.V.
Gerard Van Schothorst
F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information
Patent Grant
Lithographic apparatus and motor for use in the apparatus
Patent number
6,943,464
Issue date
Sep 13, 2005
ASML Netherlands B.V.
Sven Antoin Johan Hol
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information
Patent Grant
Lithographic apparatus and motor for use in the apparatus
Patent number
6,717,296
Issue date
Apr 6, 2004
ASML Netherlands B.V.
Sven Antoin Johan Hol
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information
Patent Grant
Positioning device with a reference frame for a measuring system, a...
Patent number
5,953,105
Issue date
Sep 14, 1999
U.S. Philips Corporation
Gerard Van Engelen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Positioning device with a force actuator system for compensating ce...
Patent number
5,844,664
Issue date
Dec 1, 1998
U.S. Philips Corporation
Johannes M. M. Van Kimmenade
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Positioning device with a vibration-free object table, and lithogra...
Patent number
5,844,666
Issue date
Dec 1, 1998
U.S. Philips Corporation
Gerard Van Engelen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic device with a three-dimensionally positionable mask ho...
Patent number
5,767,948
Issue date
Jun 16, 1998
U.S. Philips Corporation
Erik R. Loopstra
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Positioning device having two manipulators operating in parallel, a...
Patent number
5,301,013
Issue date
Apr 5, 1994
U.S. Philips Corporation
Hendricus J. M. Meijer
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
Y-THETA TABLE FOR SEMICONDUCTOR EQUIPMENT
Publication number
20200098722
Publication date
Mar 26, 2020
ASM Technology Singapore Pte Ltd
Jan VAN EIJK
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SENSOR, OBJECT POSITIONING SYSTEM, LITHOGRAPHIC APPARATUS AND DEVIC...
Publication number
20170277042
Publication date
Sep 28, 2017
ASML NETHERLANDS B.V.
Johannes Antonius Gerardus AKKERMANS
G01 - MEASURING TESTING
Information
Patent Application
CONTROL SYSTEM, POSITIONING SYSTEM, LITHOGRAPHIC APPARATUS, CONTROL...
Publication number
20170212431
Publication date
Jul 27, 2017
ASML NETHERLANDS B.V.
Marinus Maria Johannes VAN DE WAL
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
STAGE POSITIONING SYSTEM AND LITHOGRAPHIC APPARATUS
Publication number
20170010543
Publication date
Jan 12, 2017
ASML NETHERLANDS B.V.
Wilhelmus Henricus Theodorus Maria AANGENENT
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS, AND PATTERNING DEVICE FOR USE IN A LITHOGRA...
Publication number
20140022526
Publication date
Jan 23, 2014
ASML NETHERLANDS B.V.
Jan VAN EIJK
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
System for Detecting Motion, Lithographic Apparatus and Device Manu...
Publication number
20130194586
Publication date
Aug 1, 2013
ASML NETHERLANDS B.V.
Jan Van Eijk
G01 - MEASURING TESTING
Information
Patent Application
LITHOGRAPHIC APPARATUS COMPRISING A SUBSTRATE TABLE
Publication number
20120300188
Publication date
Nov 29, 2012
ASML NETHERLANDS B.V.
Hans Butler
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
ARRANGEMENT FOR THE VIBRATION ISOLATION OF A PAY LOAD
Publication number
20120241268
Publication date
Sep 27, 2012
Carl Zeiss SMT GMBH
Dick Antonius Hendrikus Laro
G02 - OPTICS
Information
Patent Application
ELECTROMAGNETIC ACTUATOR, STAGE APPARATUS AND LITHOGRAPHIC APPARATUS
Publication number
20120212723
Publication date
Aug 23, 2012
ASML NETHERLANDS B.V.
Sven Antoin Johan Hol
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SUCTION UNIT AND AUTONOMOUS VACUUM CLEANER
Publication number
20110239397
Publication date
Oct 6, 2011
Koninklijke Philips Electronics N.V.
Jeroen Dekkers
A47 - FURNITURE DOMESTIC ARTICLES OR APPLIANCES COFFEE MILLS SPICE MILLS SUCT...
Information
Patent Application
POSITIONING SYSTEM AND A METHOD FOR POSITIONING A SUBSTAGE WITH RES...
Publication number
20110075122
Publication date
Mar 31, 2011
ASML NETHERLANDS B.V.
Sven Antoin Johan Hol
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
POSITIONING SYSTEM, LITHOGRAPHIC APPARATUS AND METHOD
Publication number
20110026004
Publication date
Feb 3, 2011
ASML NETHERLANDS B.V.
Jan Van Eijk
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20110007294
Publication date
Jan 13, 2011
ASML NETHERLANDS B.V.
Jan VAN EIJK
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS
Publication number
20100302518
Publication date
Dec 2, 2010
ASML NETHERLANDS B.V.
Jan VAN EIJK
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS WITH GAS PRESSURE MEANS FOR CONTROLLING A PL...
Publication number
20100159399
Publication date
Jun 24, 2010
ASML NETHERLANDS B.V.
Johannes Petrus Martinus Bernardus VERMEULEN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS, AND PATTERNING DEVICE FOR USE IN A LITHOGRA...
Publication number
20100157263
Publication date
Jun 24, 2010
ASML NETHERLANDS B.V.
Jan Van Eijk
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
System for Detecting Motion of a Body
Publication number
20090001260
Publication date
Jan 1, 2009
Koninklijke Philips Electronics, N.V.
Ronatus Gerardus Klaver
G01 - MEASURING TESTING
Information
Patent Application
Lithographic apparatus
Publication number
20090002676
Publication date
Jan 1, 2009
ASML NETHERLANDS B.V.
Gerard Van Schothorst
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Displacement Device
Publication number
20080203828
Publication date
Aug 28, 2008
Koninklijke Philips Electronics, N.V.
Johan Cornelis Compter
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Apparatus for processing an object with high position accurancy
Publication number
20070069666
Publication date
Mar 29, 2007
Koninklijke Philips Electronics N.V.
Jan Van Eijk
G05 - CONTROLLING REGULATING
Information
Patent Application
Lithographic apparatus and device manufacturing method
Publication number
20050041233
Publication date
Feb 24, 2005
ASML NETHERLANDS B.V.
Gerard Van Schothorst
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus and motor for use in the apparatus
Publication number
20030052548
Publication date
Mar 20, 2003
Sven Antoin Johan Hol
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC