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Patents Grants
last 30 patents
Information
Patent Grant
Lithographic apparatus and contamination removal or prevention method
Patent number
9,599,908
Issue date
Mar 21, 2017
ASML Netherlands B.V.
Anthonius Martinus Cornelis Petrus De Jong
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and contamination removal or prevention method
Patent number
9,158,206
Issue date
Oct 13, 2015
ASML Netherlands B.V.
Anthonius Martinus Cornelis Petrus De Jong
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus, reflective member and a method of irradiati...
Patent number
9,019,466
Issue date
Apr 28, 2015
ASML Netherlands B.V.
Martinus Hendrikus Antonius Leenders
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus, a method of controlling the apparatus and a...
Patent number
8,836,915
Issue date
Sep 16, 2014
ASML Netherlands B.V.
Pieter Mulder
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Fluid handling structure, a lithographic apparatus and a device man...
Patent number
8,711,326
Issue date
Apr 29, 2014
ASML Netherlands B.V.
Ronald Van Der Ham
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus, a method of controlling the apparatus and a...
Patent number
8,405,817
Issue date
Mar 26, 2013
ASML Netherlands B.V.
Marco Koert Stavenga
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and contamination removal or prevention method
Patent number
7,916,269
Issue date
Mar 29, 2011
ASML Netherlands B.V.
Anthonius Martinus Cornelis Petrus De Jong
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
LITHOGRAPHIC APPARATUS AND CONTAMINATION REMOVAL OR PREVENTION METHOD
Publication number
20160033875
Publication date
Feb 4, 2016
ASML NETHERLANDS B.V.
Anthonius Martinus Cornelis Petrus DE JONG
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS, A METHOD OF CONTROLLING THE APPARATUS AND A...
Publication number
20120218534
Publication date
Aug 30, 2012
ASML NETHERLANDS B.V.
Pieter MULDER
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
FLUID HANDLING STRUCTURE, A LITHOGRAPHIC APPARATUS AND A DEVICE MAN...
Publication number
20110292357
Publication date
Dec 1, 2011
ASML NETHERLANDS B.V.
Ronald Van Der Ham
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND CONTAMINATION REMOVAL OR PREVENTION METHOD
Publication number
20110188013
Publication date
Aug 4, 2011
ASML NETHERLANDS B.V.
Anthonius Martinus Cornelis Petrus DE JONG
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS, A METHOD OF CONTROLLING THE APPARATUS AND A...
Publication number
20100214543
Publication date
Aug 26, 2010
ASML NETHERLANDS B.V.
Marco Koert Stavenga
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic Apparatus And Contamination Removal Or Prevention Method
Publication number
20090025753
Publication date
Jan 29, 2009
ASML NETHERLANDS B.V.
Anthonius Martinus Cornelis Petrus DE JONG
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic Apparatus and Contamination Removal or Prevention Method
Publication number
20090027635
Publication date
Jan 29, 2009
ASML NETHERLANDS B.V.
Anthonius Martinus Cornelis Petrus DE JONG
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic Apparatus, Reflective Member And A Method of Irradiati...
Publication number
20090027636
Publication date
Jan 29, 2009
ASML NETHERLANDS B.V.
Martinus Hendrikus Antonius LEENDERS
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY