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Jan Willem Hub Maes
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Hevelee, BE
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last 30 patents
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Patent Grant
Low temperature method of forming a gate stack with a high k layer...
Patent number
6,806,145
Issue date
Oct 19, 2004
ASM International, N.V.
Suvi Haukka
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
Low temperature gate stack
Publication number
20030049942
Publication date
Mar 13, 2003
Suvi Haukka
H01 - BASIC ELECTRIC ELEMENTS