Janardan NATH

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Norwalk, CT, US

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Patents Grantslast 30 patents

Information Patent Grant
Lithographic apparatus and illumination uniformity correction system
- Patent number 11,656,555
- Issue date May 23, 2023
- ASML Holding N.V.
- Janardan Nath
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
LITHOGRAPHIC METHOD TO ENHANCE ILLUMINATOR TRANSMISSION
- Publication number 20240353756
- Publication date Oct 24, 2024
- ASML NETHERLANDS B.V.
- Todd R. DOWNEY
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
OPTIMIZATION USING A NON-UNIFORM ILLUMINATION INTENSITY PROFILE
- Publication number 20220390832
- Publication date Dec 8, 2022
- ASML Holding N.V.
- Janardan NATH
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND ILLUMINATION UNIFORMITY CORRECTION SYSTEM
- Publication number 20220214622
- Publication date Jul 7, 2022
- ASML Holding N.V.
- Janardan NATH
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY