Membership
Tour
Register
Log in
Jane Chang
Follow
Person
Cambridge, MA, US
People
Overview
Industries
Organizations
People
Information
Impact
Patents Grants
last 30 patents
Information
Patent Grant
UV/halogen metals removal process
Patent number
6,183,566
Issue date
Feb 6, 2001
FSI International, Inc.
Andrew Scott Lawing
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Metals removal process
Patent number
6,083,413
Issue date
Jul 4, 2000
Massachusetts Institute of Technology
Herbert H. Sawin
B08 - CLEANING
Information
Patent Grant
UV/halogen metals removal process
Patent number
5,954,884
Issue date
Sep 21, 1999
FSI International Inc.
Andrew Scott Lawing
H01 - BASIC ELECTRIC ELEMENTS